应变敏感的柔性自旋阀器件制备与输运特性  

Fabrication and transport properties of flexible spin-valve strain sensors

作　　者：潘民杰 刘鲁萍 李金财 李培刚[3] PAN Min-jie;LIU Lu-ping;LI Jin-cai;LI Pei-gang(College of Materials and Textiles, Zhejiang Sci-Tech University, Hangzhou 310018, China;Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China;School of Science, Zhejiang Sci-Tech University, Hangzhou 310018, China)

机构地区：[1]浙江理工大学材料与纺织学院,浙江杭州310018 [2]中科院宁波材料与工程技术研究所,中科院磁性材料与器件重点实验室,浙江宁波315201 [3]浙江理工大学理学院,浙江杭州310018

出　　处：《磁性材料及器件》2017年第4期1-5,共5页Journal of Magnetic Materials and Devices

摘　　要：利用超高真空磁控溅射系统,通过改变生长气压、生长功率等制备了矫顽力小、方形度好的FeCo、FeGa磁性薄膜。以FeCo作为自由层,并在其引入大磁致伸缩系数材料FeGa,获得具有FeCo/FeGa复合自由层的自旋阀结构。通过优化薄膜厚度获得了磁电阻比5.9%、自由层矫顽力34 Oe的最佳综合磁性能。将具有复合自由层的自旋阀结构制备在柔性聚对苯二甲酸乙二酯衬底上,在接近2%的拉应变作用下,器件有良好的应变响应,其磁电阻比从5.9%几乎线性地降至4.9%,因此可以用于柔性应变传感器。FeCo and FeGa thin films with small coercivity and large remanence ratio were prepared by changing the sputter pressure and power in an ultra-high vacuum magnetron sputter system.Using FeCo as free layer and introducing large magnetostrictive FeGa alloy into the free layer the spin-valve structure was prepared with FeGa/FeCo composite free layer.By optimizing the layer thickness,spin valve was obtained with GMR ratio of5.9%,the free layer coercivity of34Oe.Then,the spin-valve structure with a FeGa/FeCo composite free layer was prepared on flexible PET substrate.Under a tensile strain of2%,the device has a good strain response,and its GMR ratio is reduced from5.9%to4.9%,thus it has a potential application in flexible strain sensor.

关 键 词：柔性自旋阀 磁性薄膜 磁控溅射 巨磁电阻 磁致伸缩 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]