精密运动平台的五自由度误差同时测量方法  

Simultaneous measurement of five-degree-of-freedom motion errors of high-precision motion platforms

作　　者：王丽军 郑煜 吕文 李继攀 段吉安 WANG Lijun;ZHENG Yu;Lü Wen;LI Jipan;DUAN Ji’an(State Key Laboratory of High Performance Complex Manufacturing,School of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China)

机构地区：[1]中南大学机电工程学院,高性能复杂制造国家重点实验室,湖南长沙410083

出　　处：《中南大学学报（自然科学版）》2017年第10期2629-2635,共7页Journal of Central South University:Science and Technology

基　　金：国家自然科学基金资助项目(51475479);国家高新技术研究发展计划(863计划)项目(2012AA040406);湖南省自然科学基金资助项目(14JJ2010);浙江大学流体动力与机电系统国家重点实验室开放基金资助项目(ZKF-201401)~~

摘　　要：提出一种同时测量运动平台五自由度误差的方法。采用准直的激光光束作为基准,仅以角锥棱镜作为误差测量的敏感器件,由1个斜方棱镜和聚焦透镜并辅以光电位移传感器组成测量系统。研究结果表明:直线运动平台2个直线度误差和3个角度误差可同时测量,且测量头无电缆连接;测量直线度误差的分辨率小于0.1μm,角度误差的分辨率小于1″;直线度和角度测量精度分别达到1μm和5″。测量系统结构简单,易于安装和调节,适用于运动平台多自由度误差精密测量。A quite simple and novel method for simultaneous measurement of five-degree-of-freedom motion errors was proposed.The collimated laser beam was used as the reference line,and only a cube corner prism was adopted in the moving platform as the sensitive element.The optical system was composed of a rhombic prism,a focus lens and three detectors.The results show that the horizontal and vertical straightness errors as well as pitch,yaw and roll angle errors can be measured simultaneously.At the same time,the measuring head is smart and wireless.The resolution of the straightness and angle errors can reach0.1μm,1″,respectively,and the measurement accuracy of straightness errors and angular errors are about1μm and5″within the travel range of a high-precision motion platform.This system is compact and can be easily equipped to any motion platforms to implement the measurement of multi-degree-of-freedom motion errors.

关 键 词：同时测量 五自由度 运动误差 准直光束 运动平台 

分 类 号：TN247[电子电信—物理电子学]