微悬臂梁长度对梁末端与底座粗糙面间接触的影响  

Impact of Micro-cantilever Length on Beam End and Base Contact

作　　者：黄健萌[1] 陈英 HUANG Jianmeng;CHEN Ying(College of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350108, China)

机构地区：[1]福州大学机械工程及自动化学院,福建福州350108

出　　处：《机械制造与自动化》2017年第6期20-24,共5页Machine Building & Automation

基　　金：国家自然科学基金资助项目(51205062);福建省自然科学基金项目(2011J01299)

摘　　要：将磁致伸缩效应等效为材料的热膨胀效应,考虑微梁末端与底座粗糙面微凸体间的相互作用、材料弹塑性变形及微梁弹性恢复力等影响,利用ABAQUS动态模拟了磁致伸缩薄膜悬臂梁末端与底座粗糙面间的接触,分析了不同长度悬臂梁对接触特性的影响。结果表明,重复加卸载过程中,接触面积、法向接触力随着微梁长度的增加呈近似线性增长,而最大等效塑性应变值随微梁长度的增加呈非线性关系,说明微梁长度对梁与底座粗糙面间接触特性的影响十分重要,进而影响到系统工作的可靠性。Magnetostrictive effect is regarded as the effect of thermal expansion of the material.Giving full consideration to the interaction between the ending of beam and substrate rough surface,elastic-plastic deformation of material,micro-cantilever elastic recovery and so on,this paper uses ABAQUS software to make the dynamic simulation of the contact between the magnetostrictive film cantilever with defferent length and substrate rough surface,and analyzes the influence of its lenght on the contact.The results show that within the certain range,in the process of the entire driving,the contact area and the normal contact force increase with length ening the micro-cantilever.And it exhibits the relationship between the length of the micro cantilever beam and the substrate contact,which affects the reliability of the system work.

关 键 词：MEMS器件 磁致伸缩薄膜微悬臂梁 粗糙面 微梁长度 接触特性 

分 类 号：TH117.1[机械工程—机械设计及理论]