显微式激光多普勒测振系统的开发与应用  

Development and Application of the Micro Laser Doppler Vibrometer System

作　　者：刘志方 杨兴 宋耀东 刘红魏 宋云峰 李伸朋 LIU Zhifang;YANG Xing;SONG Yaodong;LIU Hongwei;SONG Yunfeng;LI Shenpeng(Ningbo Sunny Intelligent Technology Co., Ltd., Ningbo 315400, China)

机构地区：[1]宁波舜宇智能科技有限公司,浙江宁波315400

出　　处：《机械工程师》2018年第3期137-139,共3页Mechanical Engineer

基　　金：国家重大科学仪器设备开发专项(2013YQ470765);宁波市科技创新团队(2013B82005)

摘　　要：提出了一种显微式的激光多普勒测振系统。该系统基于激光多普勒测振原理,综合运用激光外差干涉技术和显微缩束技术,结合电路解调功能实现模拟信号的解调,通过数据采集及算法处理,实现振动信号的波形显示及结果分析。通过与BK-4527型传感器的对比试验表明,该显微测振系统可以很好地实现精确测量。同时,该系统可实现对微机电系统的振动测试和位置定位,弥补了传统激光多普勒测振系统无法测量微小物体振动的缺陷,具有良好的应用前景。A new micro laser Doppler vibrometer system is presented.Based on laser Doppler effect,this vibrometer can achieve signal measurement by using laser heterodyne interferometry and micro narrowed beam and by means of signaldemodulation processor.Then the signal can be analyzed to achieve the vibration waveform display and result analysis.Compared with B K-4527sensor,this micro laser vibrometer can achieve good accuracy.Meanwhile,this vibrometer system can successfully achieve the vibration measurement and area location on the MEMS.The micro laser doppler vibrometer may be widely used because it can make up for the defect of vibration measurement of big object.

关 键 词：显微激光多普勒测振 微机电系统 激光外差干涉 显微缩束 BK传感器 

分 类 号：O329[理学—一般力学与力学基础]