退火温度对Co_2FeAl薄膜磁与结构特性的影响  

Effects of annealing temperature on the magnetic and structural properties of Co_2FeAl films

作　　者：徐展[1] 庄凤江[1] 苏少坚[1] 陈传文[1] 王可[1] XU Zhan;ZHUANG Feng-jiang;SU Shao-jian;CHEN Chuan-wen;WANG Ke(College of Information Science and Engineering, Huaqiao University, Xiamen 361021, China)

机构地区：[1]华侨大学信息科学与工程学院,福建厦门361021

出　　处：《磁性材料及器件》2018年第2期10-13,共4页Journal of Magnetic Materials and Devices

基　　金：国家自然科学基金资助项目(61505058;61404054);华侨大学中青年教师科研提升资助计划项目(ZQN-YX107)

摘　　要：用磁控溅射法制备了一系列Co_2FeAl合金薄膜,并进行了退火处理。利用振动样品磁强计(VSM)和X射线衍射(XRD)对样品进行表征,研究了溅射功率和退火温度对Co_2FeAl薄膜磁与结构特性的影响。高功率下制备的沉积态薄膜就具有强磁性,同时也具有单轴磁各向异性;而对应的低功率下制备的沉积态薄膜则呈现出弱磁性。300℃退火后出现单轴磁各向异性;700℃退火后,所有薄膜均表现为磁各向同性。随着退火温度的升高,薄膜的矫顽力变大。X射线衍射分析表明,随着热处理温度升高,薄膜的晶粒尺寸增大,从而导致晶粒间磁耦合作用增强,这与薄膜的磁特性结果相一致。Co2FeAl alloy films were prepared by magnetron sputtering at different powers and annealed at different temperatures.The influence of sputtering power and annealing temperature on the magnetic properties of Co2FeAl films was investigated by vibrating sample magnetometer(VSM)and X-ray diffraction(XRD),respectively.The results show that the as-deposited film sputtered at low power is weak-magnetic.Then the alloy annealed at300℃exhibits magnetic anisotropy.In contrast,the as-deposited film sputtered at high power is ferromagnetic and exhibits uniaxial magnetic anisotropy.Moreover,It is found that the in-plane magnetic anisotropy disappears when the samples were annealed at700℃.X-ray diffraction measurements reveal the grain size of the films increases with the annealing temperature.The coercivity is found to increase with the annealing temperature,which is accordance with the grown nanocrystalline grain size.

关 键 词：Co2FeAl薄膜 溅射功率 退火温度 磁各向异性 

分 类 号：TM27[一般工业技术—材料科学与工程]