研磨面平尺的相移干涉测量方法  

Method for Verifying Milling Straight Edges Based on Phase Shifting Interferometer

作　　者：王青[1] 顾洋 WANG Qing;GU Yang(Nanjing University of Science and Technology,Nanjing 201194,China)

机构地区：[1]南京理工大学,江苏南京210094

出　　处：《计测技术》2018年第1期38-42,共5页Metrology & Measurement Technology

基　　金：国家重大仪器专项开发(2013YQ150829)

摘　　要：在平面度计量体系中,研磨面平尺是重要的量值传递标准器。本文提出了利用相移干涉仪非接触、高采样密度及全自动化测量的特点,采用标准平晶直接测量研磨面平尺以获得更高的测量精度的方法。子孔径分段测量后拼接方法,以及斜入射测试方法,均可以取消长平晶的过渡,达到了量值传递扁平化的要求。文中以Φ150 mm相移干涉仪直接测量300 mm研磨面平尺为例,介绍了两种测量方法的原理和测量结果,并从中按标准要求提取了以稀疏点定义的平面度结果。对照检定规程,分析了采用相移干涉仪测量结果的数据不确定度评价方法,两种测量方法的归一化偏差小于0.5。Milling straight edges is currently a vital standard gauge for the verification items of flatness.Two methods for measuring milling straight edges based on phase shifting interferometer are put forward,whose advantages are non-contact,high sampling density and high accuracy frequency measurement.One is the sub-aperture stitching method;the other is the oblique incidence method.The simplification in verification items was achieved by using standard optical flat directly and long optical flat was excluded in the items.TakeΦ150 mm phase shifting interferometer and 300 mm milling straight edge as an example,this paper introduces the principles and measuring results of the two methods,and gets flatness(sparse points)from the data of phase shifting interferometer to keep to the requirements of the verification regulation.Finally,the author summaries and estimates the uncertainty of measurement in contrast with the verification regulation.The normalized error of the two methods is less than 0.5.

关 键 词：平面度 长平晶 研磨面平尺 子孔径拼接 斜入射 

分 类 号：TB921[一般工业技术—计量学]