大尺寸高密度压电陶瓷的制备与研究  

Preparation and Study of Large-size and High Density Piezoelectric Ceramics

作　　者：李洪平[1] 米佳[1] 鲜晓军[1] 赵雪梅[1] 许东辉[1] 朱勇[1] 董加和[1] 陈彦光[1] LI Hongping;MI Jia;XIAN Xiaojun;ZHAO Xuemei;XU Donghui;ZHU Yong;DONG Jiahe;CHEN Yanguang(26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2018年第2期244-246,共3页Piezoelectrics & Acoustooptics

摘　　要：该文主要采用固相反应法制备了Pb(1-a-b)Ba_aSr_b(Zr_xTi_y)_(1-c-d)(Bi_(3/2)W_(1/2))_c(S_(b1/2)Nb_(3/2))dO_3四元系压电陶瓷材料,通过各组分的比例调整和适当的掺杂改性,材料横向压电应变常数可达-490pm/V,介电常数为4 500,介电损耗小于2%;采用干压加冷等静压成型,并优化烧结工艺,制备出该压电材料密度达到理论密度值的99%,尺寸为?170mm×15mm的大尺寸压电陶瓷块体,为大口径变形镜用玻璃基压电陶瓷薄膜的研制奠定了基础。In this paper,the Pb(1-a-b)Ba a Sr b(Zr x Ti y)1-c-d(Bi 3/2 W 1/2)c(Sb 1/2 Nb 3/2)d O 3 quaternary piezoelectric ceramic materials were prepared by the solid phase reaction method.Through the proportion of the each component adjustment and appropriate doping modification,the transverse piezoelectric strain constant(d 31)of-490 pm/V,dielectric constant of 4 500 and dielectric loss of less than 2%have been realized in the material.By adopting the dry pressing,cold isostatic pressing(CIP)and optimizing the sintering process,the large-size piezoelectric ceramic bulk with the theoretical density of above 99%and the size of 170 mm×15 mm has been prepared.The work lays the foundation for the development of glass-based piezoelectric ceramic films for large-diameter deformable mirror.

关 键 词：压电陶瓷 横向压电应变常数 介电常数 介电损耗 大尺寸 高密度 

分 类 号：TM281[一般工业技术—材料科学与工程] TN384[电气工程—电工理论与新技术]