国产衬底片在双极型集成电路制造中的应用  

The Application of Domestic Substrate in the Manufacture of Bipolar Integrated Circuit

作　　者：戴学春 周卫平 任萍萍 DAI Xuechun;ZHOU Weiping;REN Pingping(Advanced Semiconductor Manufacturing Corporation,Shanghai 200233,China)

机构地区：[1]上海先进半导体制造有限公司,上海200233

出　　处：《集成电路应用》2018年第3期45-48,共4页Application of IC

基　　金：上海市科学技术委员会科技创新行动计划高新技术基金(17DZ1100300)

摘　　要：随着国产衬底的生产工艺和控制能力的不断提升,国产衬底的应用也越来越广。作者就国产衬底在双极型集成电路制造中普遍关心的问题做了全面的评估,包括物理参数、电参数、圆片合格率,以及大规模生产的工程能力指数。评估结果说明国产衬底在品质上已经完全能够媲美进口衬底,满足大规模生产的需求。The domestic substrate manufacturing technology and control capability is improving continuously.The application of domestic substrate is more and more widely.In this paper,the author made entirely assessment on the domestic substrate in bipolar integrated circuit manufacturing,including physical parameters,electrical parameters,product yield and mass production performance.The experiment results prove that domestic substrate has been able to match the imported substrate and meet the demand of mass production.

关 键 词：集成电路制造 硅衬底 双极型集成电路 衬底物理参数 衬底翘曲 失焦 电参数 工程能力指数 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN305.2