一种简单的电容式三维力柔性触觉传感器设计  

Design of a Simple Three Dimensional Force Flexible Tactile Sensor

作　　者：张淑艳[1] 张金红[1] 赵立蕊 ZHANG Shuyan;ZHANG Jinhong;ZHAO Lirui(Hebei College of Industry and Technology,Shijiazhuang 050091,China)

机构地区：[1]河北工业职业技术学院,石家庄050091

出　　处：《电子器件》2018年第1期95-99,共5页Chinese Journal of Electron Devices

基　　金：河北省高等学校科学技术研究项目2015年重点项目(ZD2015041)

摘　　要：随着机器人智能化程度不断提高,机器触觉和机器视觉技术均得到了很大发展,但是目前大部分触觉传感器均不能满足触觉感知应用的要求。因此,提出了一种新型的具有滑觉检测功能的柔性三维力触觉传感器。该传感器能够将力量变化转化为两绝缘层间的气隙变化,进而引起电容发生变化。然后将接触力建模为实测电容的多项式函数,对传感器输出进行校正进而实现法向力测量和滑动检测。测试结果显示,提出的传感器能够以较高的精确度测量法向力,重复性好,并且能够检测滑动现象,在0~100 mN测量范围内的法向灵敏度约为0.4 pF/N,均方根误差为1%。此外提出的传感器结构简单、成本较低,易于大规模生产和应用。With the increasing degree of robot intelligence,machine vision and machine vision technology has been greatly developed,but most of the tactile sensors can not meet the requirements of the application of tactile sensing.Therefore,a new kind of flexible three-dimensional force tactile sensor with slip sensing function is proposed.The sensor can transfer the power change into the air gap between two isolution layers,which can cause the change of capacitance.Then,the contact force is modeled as a polynomial function of the measured capacitance,and the output of the sensor is calibrated to achieve normal force measurement and sliding detection.The test results show that the proposed sensor can measure normal force with high accuracy,good repeatability,and can detect the sliding phenomenon.The normal sensitivity is about 0.4 pF/N in the range of 0~100 mN measurement,and the RMS error is 1%.In addition,the proposed sensor has simple structure,low cost and easy to mass production and application.

关 键 词：机器人 触觉传感器 柔性 电容传感器 滑觉检测 力值测量 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]