大口径非球面系统的共基准加工与检验  

Fabrication and testing of large aspheric system based on common reference

作　　者：王孝坤[1] 薛栋林[1] 张学军[1] WANG Xiao-kun;XUE Dong-lin;ZHANG Xue-jun(Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]中国科学院,长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《光学精密工程》2018年第4期743-748,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61036015)

摘　　要：针对大口径离轴非球面系统加工与装调的难点,提出了非球面光学系统共基准加工与检测的方法,对该方法的基本原理和实现过程进行了分析和研究。当光学系统的主镜和第三镜面形的RMS值优于λ/10(λ=632.8nm)时,对主镜和第三镜进行共基准装调和测试,并进行背板一体化装嵌,然后利用离子束对其进行一体化共基准加工。结合工程实例,对一大口径非球面系统口径为724mm×247mm的非球面主镜和口径为632mm×205mm的第三镜进行了共基准加工与检测,最终利用离子束共基准一体化精抛光得到主镜和第三镜面形的RMS值分别为0.019λ和0.017λ,满足光学成像。A key technology for fabricating and testing three mirror astigmatism(TMA)was proposed based on a common reference,to overcome the difficulty of manufacturing and aligning large off-axis aspheric systems.The analysis and research of the basic principles involved were presented.When the Root Mean Square(RMS)of the surface error of the primary mirror and tertiary mirrors was better thanλ/10(for wavelengthλat 632.8 nm),the primary and tertiary mirrors were measured and aligned with the common reference and the same supporting back plate,with the two mirrors were then being polished by Ion Beam Figuring(IBF).A large TMA system with primary and tertiary mirror apertures of 724 mm×247 mm and 632 mm×205 mm,respectively was fabricated and tested based on the proposed method.The integrated mirrors were polished by IBF,and the RMSs of the surface error of the primary and tertiary mirrors are 0.019λand 0.017λ,respectively.

关 键 词：光学加工 光学检测 非球面 三镜消像散系统 共基准 离子束加工 

分 类 号：TN305.2[电子电信—物理电子学] O436.1[机械工程—光学工程]