金属微反射镜对非制冷氧化钒微测辐射热计的红外辐射吸收率影响分析与一种改进的微测辐射热计模型  

Absorptivity Analysis of Uncooled VO_x Microbolometer with Metal Reflector and an Advanced Microbolometer Model

作　　者：朱瀚杰 蒋剑良 Ali Imran ZHU Hanjie;JIANG Jianliang(Fundamental Lab of Information Optics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]北京理工大学信息光学基础实验室,北京100081

出　　处：《红外技术》2018年第4期316-321,共6页Infrared Technology

基　　金：北京市自然科学基金项目(4073040)。

摘　　要：从光学角度出发,首先讨论了单层VOx微测辐射热计中探测单元衬底上的金属反射镜的厚度以及材料对微测辐射热计红外吸收率的影响,利用软件建立了微测辐射热计的红外辐射吸收率模型,得到了厚度不同的Al反射镜对微测辐射热计模型8~14?m红外波段吸收率的影响以及厚度为0.1?m的3种不同材质的金属反射镜对同一模型红外吸收率的影响。当厚度等其他参数相同时,使用Al、Copper和Gold用作金属反射镜的材料,单层VOx微测辐射热计模型在8~14?m波段的红外吸收率并没有明显区别。另外,我们改进了一种已有的VOx微测辐射热计结构并对比了改进前后模型8~14?m红外波段的吸收率,改进后的模型平均吸收率达到了94%大于改进前初始模型的90%左右。最后,我们讨论了真空谐振腔高度与微测辐射热计桥面材料厚度对工作波段吸收率峰值处波长的影响。In this paper,the effect of material and thickness of a metal reflector above a silicon substrate on the infrared(IR)absorptivity of a single membrane VOx microbolometer(MBM)was discussed and an IR absorption model of a MBM using MATLAB and COMSOL finite element analysis software was constructed.The effects of Al,Cu and Au reflectors with a thickness of 0.1?m on IR absorptivity were recorded,and results showed matching models for each metal reflector.The relationship between IR absorptivity and thickness of Al micro-reflector in VOx MBM in the 8-14?m wavelength range was also found.Results showed that when only the texture of the reflector material was changed,a VOx MBM model with Al,Cu and Au reflectors had no clear distinction on IR absorption in the 8-14?m wavelength range.The VOx MBM model was then improved and compared to the 8-14?m wavelength IR absorption spectra of an advanced structure model.The improved model obtained a 94%average absorptivity which was higher than that of the initial model which obtained a 90%average absorptivity.Finally,the relationship between vacuum cavity height,thickness of membrane and the wavelength with a peak absorptivity within the 8-14μm band was discussed.

关 键 词：微测辐射热计 金属反射镜 红外吸收率 模型 

分 类 号：TN215[电子电信—物理电子学]