运算放大器频率特性对加速度传感器检测电路的影响分析  

Effect of amplifier frequency characteristic on the detecting circuit of MEMS capacitive accelerometer

作　　者：曲昊[1] 彭倍[1] 彭鹏[1] 周吴[1] 于慧君[1] QU Hao;PENG Bei;PENG Peng;ZHOU Wu;YU Huijun(Department of Mechatronics Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学机械电子工程学院,成都611731

出　　处：《中国科技论文》2018年第4期371-374,380,共5页China Sciencepaper

基　　金：国家自然科学基金资助项目(U1530132)

摘　　要：为分析运算放大器频率特性对加速度传感器检测电路实际性能产生的影响,提出了一种分析电路参数对运算放大器实际性能产生影响的研究方法。本研究建立了加速度传感器检测电路等效模型,分析了电路参数对运算放大器频率特性产生的影响。为验证理论分析,文中根据运算放大器的具体参数,选择合适的电路参数,设计了一个用于加速度传感器的检测电路,检测电路的实验结果与理论设计相符合。理论分析与实验结果表明,合理选择电路参数可以使运算放大器工作于理想状态,减小运算放大器频率特性对检测电路实际性能的影响。To analyze the effect of amplifier frequency characteristic on the actual performance of the detecting circuit of MEMS capacitive accelerometer,a new research method is proposed.The equivalent circuit model of the detecting circuit of the accelerometer is established and the effect of the circuit parameters on the frequency characteristic of the operational amplifier is analyzed.A detecting circuit is designed and specific circuit parameters are set to testify the theoretical analysis.Experimental data are coincident with the theoretical analysis.The results show that by properly choosing the circuit parameters,the operational amplifier can work in the ideal state and the influence of the amplifier frequency characteristic on the actual performance of the detecting circuit can be reduced.

关 键 词：机械工程 机械制造及其自动化 微机电系统 梳齿式电容加速度传感器 电荷放大电路 运算放大器频率特性 

分 类 号：TH73[机械工程—仪器科学与技术]