溶胶凝胶法制备钛酸铋薄膜中溶胶浓度对薄膜厚度和粗糙度的影响及拉曼光谱的研究  

Effect of Sol-Gel Concentration on Film Thickness and Roughness in Preparation of Bismuth Titanate thin Films and Study of Confocal Raman Spectroscopy

作　　者：余娟 王晓云 马蕊 尚洁萤 尹红梅[1,2] YU Juan;WANG Xiao-yun;MA Rui;SHANG Jie-ying;YIN Hong-mei(Xinjiang Laboratory of Phase Transitions and Microstructures in Condensed Matter Physics,College of Physical Science and Technology,Yili Normal University,Yining,Xinjiang 835000,China;School of Physics,National Lab of Solid State Microstructures,Nanjing University,Nanjing,Jiangsu 210093,China)

机构地区：[1]伊犁师范学院物理科学与技术分院,新疆凝聚态相变与微结构实验室,新疆伊宁835000 [2]南京大学物理学院,国家固体微结构重点实验室,江苏南京210093

出　　处：《伊犁师范学院学报（自然科学版）》2018年第1期29-34,共6页Journal of Yili Normal University：Natural Science Edition

基　　金：新疆自然科学基金项目“含Bi层状钙钛矿型多铁薄膜的取向控制生长研究”(2015211C296)

摘　　要：采用溶胶-凝胶工艺,在Pt/Ti/SiO_2/Si(100)基片上以不同浓度的溶胶制备出Bi层状钙钛矿Bi_4Ti_3O_(12)薄膜,用APEX型多功能力学测试系统的3D显微镜模块和拉曼光谱仪对其进行表征.结果表明:在一定范围内,不同浓度的溶胶制备出的薄膜厚度与溶胶的浓度成正比;表面粗糙程度随着薄膜浓度的增大而减小;随着浓度的增加,620~670 cm^(-1)处的拉曼峰宽逐渐缩小,变得尖锐.The Bi-layered perovskite Bi4Ti3O12 thin films with different thickness and concentration were prepared on Pt/Ti/SiO2/Si(100)substrates by sol-gel process.The microstructures of the APEX multifunctional mechanical test system were characterized by laser confocal microscopy Raman spectroscopy.The results show that the intensity of the Raman spectrum curve reflects the concentration of bismuth titanate,which is proportional to the ratio.The thickness of the film prepared by different sols is proportional to the concentration of sol.The surface roughness increases with the film The concentration increases.

关 键 词：BI4TI3O12铁电薄膜 溶胶-凝胶法(Sol-Ge) 微观结构 拉曼分析 

分 类 号：TB383.2[一般工业技术—材料科学与工程]