抗高过载微机械陀螺仪研究综述  

Research overview of anti-high overload MEMS gyroscope

作　　者：曹慧亮[1] 张英杰 寇志伟[1] 石云波[1] 唐军[1] 刘俊[1] CAO Huiliang;ZHANG Yingjie;KOU Zhiwei;SHI Yunbo;TANG Jun;LIU Jun(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan,Shanxi 030051,China)

机构地区：[1]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《河北科技大学学报》2018年第4期289-298,共10页Journal of Hebei University of Science and Technology

基　　金：国家自然科学基金(51727808;51705477);山西省留学人员科技活动择优资助项目;山西省回国留学人员科研资助项目(2016-083);中北大学电子测试技术重点实验室开放基金(ZDSYSJ2015004);毁伤技术重点学科实验室开放基金(DXMBJJ2017-15)

摘　　要：惯性制导系统在制导炮弹中有着极其重要的作用,其中,微机械陀螺仪作为惯性制导系统的核心器件,其抗高过载能力直接制约着惯性制导系统在抗高过载环境中的应用。首先,对炮射膛内高过载环境进行了建模和量化,概括了微机械陀螺结构的高过载失效机理。其次,结合国内外相关机构公开发表的研究成果,从微机械陀螺仪的抗高过载特性的角度出发,介绍了不同测控方式、不同结构形式、不同结构材料、不同工作原理的微机械陀螺仪的抗冲击能力。最后,对相关报道和论文进行了总结和归纳,提出应从驱动-检测方式、合理的吸能释能结构配置、工作原理、新型结构材料、多级系统缓冲等方面设计和改进高过载微机械陀螺结构,以提高陀螺的抗高过载能力。Inertial guidance system plays a very important role in guided artillery.Micro electro mechanical system(MEMS)gyroscope,as the core component of inertial guidance system,has high resistance to overload and restricts the application of inertial guidance system in high overload environment directly.First of all,the high overload environment in the gun chamber is modeled and quantified,and the mechanism of high overload failure of the MEMS gyro structure is summarized.Secondly,based on the previous public research results from different institutes at home and abroad,the anti-high overload MEMS gyroscopes with different monitoring methods,different structural forms,different structural materials and different working principles are introduced from the perspective of anti-overload characteristics of MEMS gyroscopes impact resistance.Finally,the related reports and papers are summarized,and it is pointed out that the anti-high overload MEMS gyroscope should be designed from the aspects of drive-detection mode,reasonable structure of energy-absorbing and energy-dissipating structure,working principle,new structural material and multi-level system buffer methods to improve the anti-high overload ablility.

关 键 词：传感器技术 高过载 微机械陀螺 梳齿电容 四波腹振动 硅材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]