多晶硅还原炉进气中添加SiCl_4、SiH_2Cl_2工艺进展  

Process progress of adding SiCl_4 or SiH_2Cl_2 into the feed gas mixture of poly-silicon reduction furnace

作　　者：贾曦[1] 梅艳 邓茹[1] Jia Xi;Mei Yan;Deng Ru(Leshan Vocational and Technical College,Leshan 614000,China)

机构地区：[1]乐山职业技术学院新能源工程系,四川乐山614000

出　　处：《云南化工》2018年第6期57-59,共3页Yunnan Chemical Technology

基　　金：四川省教育厅自然科学基金项目(17ZB0200)

摘　　要：多晶硅产能近几年迅速扩张,副产物四氯化硅(SiCl_4,简写STC)和二氯二氢硅(SiH_2Cl_2,简写DCS)随之迅速增加。出于环境保护和生产经济性考虑,需对STC和DCS进行回收处理。对于STC的处理,冷氢化工艺应用日益广泛;同时,在还原炉进气中添加STC的研究也展示了良好前景。对于二氯二氢硅的处理,研究普遍采用反歧化法,使DCS和STC反应,生成三氯氢硅(SiHCl_3,简写TCS),重新进入还原生产,循环利用。从国内外相关技术研究看,可以在还原炉进气中适量添加STC或DCS,使STC或DCS转化成TCS,从而充分利用物料,降低回收处理系统负荷,达到节能降耗环保安全的目的。The production capacity of polycrystalline silicon was expanded rapidly in recent years.The amount of byproducts SiCl4(abbrev.STC)and SiH2Cl2(abbrev.DCS)is greatly increased.In view of environmental conservation and economic producing,it is necessary to recycle and process STC and DCS.Of the methods to recycle and process STC,Low Temperature Hydrogenation is increasingly applied,and the research on adding STC into the feed gas mixture also shows a good prospect.At the present time,it is commonly studied to generate TCS by the Normalized Reaction between STC and DCS,and then SiHCl3(abbrev.TCS)produced by the reaction is cyclically utilized into the producing system.Based on related researches at home and abroad,it should be used that adding proper STC or DCS into the feed gas mixture TCS/H2,to convert STC and DCS to TCS,and thus to make full use of raw material,to decrease the CDI load,to achieve the energy-saving,cost-reducing and environmental-protecting production.

关 键 词：四氯化硅 二氯二氢硅 环保 经济性 反歧化 

分 类 号：TF89[冶金工程—有色金属冶金]