金刚石探针曲率半径对单晶铜表面粘附接触失效影响分析  

Effect of Adhesive Contact Failures on Single Crystal Copper with Different Diamond Radius

作　　者：陈晶晶 胡洪钧[1] 赖联锋 CHEN Jing-jing;HU Hong-jun;LAI Lian-feng(School of Information and Electrical Engineering,Ningde Normal University,Ningde 352100,China;School of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350108,China)

机构地区：[1]宁德师范学院信息与机电工程学院,福建宁德352100 [2]福州大学机械工程及自动化学院,福州350108

出　　处：《表面技术》2018年第8期170-174,共5页Surface Technology

基　　金：福建省自然科学基金项目资助(2017J01709;2018J01509);福建省教育厅科技项目资助(JAT160540);宁德师范学院重大科研项目培育计划(2017ZDK19);宁德师范学院校级科研项目资助(2015Q09)~~

摘　　要：目的降低微机电系统表面粘着接触失效。方法考虑纳尺度粘附力﹑单晶铜弹塑性形变及各向异性影响。基于分子动力学法的混合势函数(EAM和Morse)和Verlet算法,对不同曲率半径探针与单晶铜基底粘着接触失效特性进行研究,通过计算原子中心对称参数来描述接触区域原子破坏和迁移轨迹变化。结果研究发现探针与基底尚未接触时(即位移小于1 nm)的粘附接触力不受探针曲率半径影响;而探针下降位移大于1 nm时,探针曲率半径对粘附接触力曲线有着重要影响,即探针曲率半径越大,粘附接触力也越大,导致基底弹塑性变形更加剧烈,易诱导单晶铜基底大量原子粘附于探针底表面,产生明显的粘着效应;此外,探针曲率半径越大,接触体间粘着滞后现象越明显。结论此研究结果将对微机电系统的粘着接触失效机理和微机械产品表面轮廓设计有着重要的实践指导意义。In order to reduce the adhesive contact failure happens on MEMS products,Some influence factors are considered,including the adhesive force and the elastic-plastic deformation on substrate,and the adhesive contact failures on two body(with different probe radius and cooper substrate)were researched by molecular dynamics method based on embedded atom potentials and verlet algorithms.Furthermore,the center-symmetric parameter are applied to described destruction area and migration path changes at nano-scale.This research works found that the adhesion contact force was not affected by different probe radius before contacting(the displacement≤1 nm).As probe displacement increased(the displacement≤1 nm),the curvature radius of diamond have an significance influence on adhesion contact force curve.It also found that the larger diamond probe radius was,the more elastic-plastic deformation intense on cooper substrate,and the contact force versus displacement presents saw tooth situation obviously,which result the substrate was destroyed seriously,so that a large number of atoms were adhered on diamond probe surface,which it means that the adhesive contact failure and adhesion hysteresis phenomenon would happened.This result has important practical significance on researching the mechanism of adhesion contact failures and designing device products surface profile on MEMS products.

关 键 词：分子动力学 粘附接触力 单晶铜 探针 曲率半径 

分 类 号：TH117[机械工程—机械设计及理论]