偏正无关光纤干涉仪及其微位移测量应用  

Polarization-Independent Fiber-Optic Interferometer and its Application in Micro-displacement Measurement

作　　者：叶有祥[1,2] 周盛华 梅海平 YE Youxiang;ZHOU Shenghua;MEI Haiping(School of Optical-Eelectrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;College of Optical and Electronic Technology,China Jiliang University,Hangzhou 310018,China;Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]中国计量大学光学与电子科技学院,杭州310018 [3]中国科学院安徽光学精密机械研究所,合肥230031

出　　处：《上海理工大学学报》2018年第4期330-334,共5页Journal of University of Shanghai For Science and Technology

基　　金：浙江省科技厅公益项目(2017C33005)

摘　　要：提出了一种与偏振无关的新型光纤干涉仪,采用端面镀膜的光纤自聚焦准直器,结合球凸透镜构成共光路光纤干涉仪,其探测光与参考光在同一根普通单模光纤中共光路传输,有效消除了偏振衰落影响。通过理论建模分析,并采用高精度的压电陶瓷作为稳定信号源,搭建了微位移测量平台,实测了三角波驱动电压信号与对应的干涉信号。研究了不同扫描电压下,压电陶瓷位移和驱动电压的关系。实验结果表明,该光纤干涉仪可实现微小位移的精密测量,在超精密机床振动、微型机械、传感等方面具有应用价值。A novel polarization-independent fiber-optic interferometer was proposed,which was composed of a self-focusing collimator coated on the end surface and a spherical convex lens.The detection light and the reference light were arranged to propagate in the same common single-mode fiber along a common optical path,which effectively eliminates the influence of polarization fading.The micro-displacement measuring platform was built by virtue of the theoretical modeling and analysis,and a high-precision piezoelectric ceramic was adopted as a stable signal source.A real triangular wave driving voltage signal and the corresponding interference signal were measured with satisfactory results.The relationships between the displacement of piezoelectric ceramics and the driving voltage at the different scanning voltages were investigated.The experimental results show that the fiber interferometer can realize the precise measurement of small displacements.It has wide application value in the aspects of ultra-precision machine vibration measurement,micro machine,sensor and so on.

关 键 词：微位移测量 光纤干涉仪 共光路干涉 

分 类 号：TN929.11[电子电信—通信与信息系统]