二维工作台角度误差实时补偿研究  

Research of compensating angle error to the 2D stage in real time

作　　者：张芮 黄强先[1] 伍婷婷[1] 张连生[1] 陈丽娟[1] 程真英[1] ZHANG Rui;HUANG Qiangxian;WU Tingting;ZHANG Liansheng;CHEN Lijuan;CHENG Zhenying(School of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《中国测试》2018年第8期102-106,共5页China Measurement & Test

基　　金：国家自然科学基金项目(51475131);合肥工业大学教学研究项目(2016YQJY0103)

摘　　要：为减小二维工作台在运动过程中俯仰角、偏摆角对其定位、测量及加工精度的影响,提出一种实时补偿二维工作台角度误差的方法。将激光测量系统作为角度反馈装置,基于压电陶瓷致动器和柔性铰链设计出的六自由度微动工作台作为补偿机构,通过软件控制微动台中压电陶瓷的输入电压,达到补偿工作台角度误差的目的。实验结果表明:二维工作台在50 mm的运动范围内,角度误差实时补偿后,向X方向运动的角度基本可以控制在±3″内,向Y方向运动的角度基本可以控制在±2″内。该方法能够实现对二维工作台角度误差的实时补偿,对提高工作台的定位精度有参考价值。A method to compensate the angle error of two-dimensional(2D)stage in real time is proposed to reduce the impact of the 2D stage’s pitch and yaw angles on the accuracy of positioning,measurement and processing during movement.With laser measuring system as the angle feedback device and the 6-DOF micro stage based on piezoelectric ceramic actuators and flexible hinges as the compensation mechanism,the purpose of compensating the angle error of the stage is realized by controlling the input voltage of piezoelectric actuator in micro stage with software.Experimental results show that:with a movement range of 0 to 50mm and after the real-time angle compensation,the angle of the X-axis direction can be controlled within±3″,and the angle of the Y-axis direction can be controlled within±2″for the 2D stage.The method can realize the real-time compensation for the angle error of the 2D stage,and has an important reference significance to improve the positioning accuracy of the stage.

关 键 词：二维工作台 角度误差 压电陶瓷致动器 角度补偿 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]