TMR单芯片微弱电流传感器的研制  

Study and manufacture of TMR single chip weak current sensor

作　　者：王峥 郭海平 庞振江 徐绥召 王海宝 Wang Zheng;Guo Haiping;Pang Zhenjiang;Xu Suizhao;Wang Haibao(State Grid Key Laboratory of Power Industrial Chip Design and Analysis Technology, Beijing Smart-Chip Microelectronics Technology Co.,Ltd.,Beijing 100192,China;Beijing Engineering Research Center of High-reliability IC with Power Industrial Grade, Beijing Smart-Chip Microelectronics Technology Co.,Ltd.,Beijing 100192,China;Jiangsu Multi-dimension Technology Co.,Ltd.,Zhangjiagang 215634,Jiangsu,China)

机构地区：[1]北京智芯微电子科技有限公司 国家电网公司重点实验室电力芯片设计分析实验室,北京100192 [2]江苏多维科技有限公司,江苏张家港215634 [3]北京智芯微电子科技有限公司 北京市电力高可靠性集成电路设计工程技术研究中心,北京100192

出　　处：《电测与仪表》2018年第17期129-133,共5页Electrical Measurement & Instrumentation

基　　金：工信部支持项目(0714-EMTC02-5378/4)

摘　　要：针对微弱电流的检测,提出了一种单芯片微弱电流传感器,其原理是:利用隧道磁电阻(TMR)元件作为磁场敏感元件,并将电流导体和TMR元件进行集成,以减小电流导体与磁场敏感元件的间距,提高电流测量的分辨率。结合MEMS工艺,通过优化设计TMR元件结构和电流导体结构,研制出了电流分辨率达到20μA的微弱电流传感器,为微弱电流检测提供了一种有效、廉价的解决方案。In this research,we obtained a single chip sensor for weak current detection.The working principle of this sensor is utilizing the TMR device as magnetic field sensing unit,and integrating current conductors with TMR element to reduce the distance between the current conductors and magnetic field sensitive device,so as to improve the resolution in current detection.We fabricated a weak current sensor with the resolution of 20μA using MEMS process by optimizing the structure of both TMR device as well as current conductors.This current sensor offers a promising and economic solution for weak current detection.

关 键 词：TMR元件 高分辨率 微弱电流检测 MEMS 

分 类 号：TM933[电气工程—电力电子与电力传动]