多层介质薄膜的陡边设计与研究  

Design and research of steep side of the multi-layer dielectric thin films

作　　者：章瑛 郑吉林 齐红基[2] 阮双琛[1] 王胭脂[2] 赵娇玲[2] ZHANG Ying;ZHENG Jilin;QI Hongji;RUAN Shuangchen;WANG Yanzhi;ZHAO Jiaoling(College of Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,Guangdong Province,P.R.China;Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Science,Shanghai 201800,P.R.China)

机构地区：[1]深圳大学光电工程学院,广东深圳518060 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《深圳大学学报（理工版）》2018年第5期505-510,共6页Journal of Shenzhen University(Science and Engineering)

基　　金：国家自然科学基金资助项目(11705259);广东省自然科学基金资助项目(2017A030310130);中国博士后科学基金资助项目(2016M592528;2016M602517)~~

摘　　要：为达到空间滤波的目的,元件必须具有对角度高反和高透的特性,因为滤波是通过反射元件边缘的高反和高透快速切换来实现的.多层介质膜的反射带边缘具有高反和高透的特性并且具有角度的敏感性,所以多层介质膜反射元件成为组合滤波器件中最有潜力的元件之一.本研究针对多层介质薄膜反射元件的陡边进行设计,提出利用多层介质薄膜反射元件实现滤波的设想,给出角度分辨率和波长分辨率的目标,比较多层介质膜高级次新型反射薄膜、F-P带通滤光片和长波通新型反射薄膜的陡边设计与研究.考虑到元件的抗损伤能力,对归一化电场强度进行计算,得出了高级次新型反射膜和长波通新型反射膜的最佳设计结果.该研究为下一步介质膜组合滤波器的设计和制备奠定了基础.In order to achieve high performance of spatial filtering,the components must have a high reflectivity and transmittance.This is because the spatial filtering is achieved by changing fast between high reflectivity and high transmittance of the edge of the reflective component.The reflective band edge of the multilayer dielectric film has high reflectivity and high transmittance characteristics and angular sensitivity,so the multilayer dielectric film reflective component becomes one of the most promising components in the combined filter device.This paper designs the steep edges of multilayer dielectric film reflective film components.We propose an idea of achieving filtering by using multi-layer dielectric film reflection element,and give the target of angular and wavelength resolution in order to make the film design more effective.For the multi-layer dielectric films,we compare and investigate the designs of steep sides for the advanced new type reflective thin films,F-P band pass filter and long pass reflective films.By considering the anti-damage ability of the components and calculating the normalized electric field strength,we find that the designs for the high level new type reflective film and the long pass new type reflective film are optimal.These research results will lay a good foundation for the design and preparation of the next-stage dielectric film filter,which has important guiding significance.

关 键 词：光学工程 强激光材料 多层介质 薄膜 空间滤波 陡边 分辨率 

分 类 号：O484.8[理学—固体物理]