精密导轨研磨抛光机设计  

Precision Lapping and Polishing Machine Tool of Guides Design

作　　者：顾国刚[1] 成贤锴[1] 陈琦[1,2] 于涌[1] GU Guo-gang;CHENG Xian-kai;CHEN Qi;YU Yong(Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences,Suzhou Jiangsu 215163,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]中国科学院苏州生物医学工程技术研究所,江苏苏州215163 [2]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《组合机床与自动化加工技术》2018年第9期111-113,117,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家重大科研装备研制项目(ZDYZ2013-1)

摘　　要：以精密导轨研磨抛光机为研究对象,针对Al2O3陶瓷导轨的特性、导轨加工机床结构特点和机床加工、装调难度,对精密导轨研磨抛光机进行了总体设计。以ANSYS静力学分析和模态分析为依据,对机床主体结构、主轴结构等进行了设计。最后,利用研制的精密导轨研磨抛光机对Al_2O_3陶瓷导轨进行试件加工,利用Zygo平面干涉仪检测面形,最终面形精度PV值0.63λ(λ=632.8nm),具有很高的精度。Based on characteristics of Al 2O 3 ceramic guides,structural characteristics of guides machining machine tools,and capacity for product machining and assembly,the overall structure of the precision lapping and polishing machine tool is designed.According to static analysis and modal analysis by ANSYS software,main structure of the machine tool and spindle is designed.Finally,Al 2O 3 ceramic gudies is machined by the machine tool,and a Zygo interferometer is used to detect face of the guide,which shows the PV value is 0.63λ(λ=632.8nm).

关 键 词：抛光机 陶瓷导轨 主体结构 

分 类 号：TH122[机械工程—机械设计及理论] TG506[金属学及工艺—金属切削加工及机床]