高性能柔性电极制备及其电化学性能研究  

Preparation Flexible Electrodes with High Performance and Their Electrochemical Performance

作　　者：李艳红[1] LI Yanhong(Department of Mechanical and Electrical Engineering,Shandong Water Conservancy Vocational College,Rizhao Shandong 276826,China)

机构地区：[1]山东水利职业学院机电工程系,山东日照276826

出　　处：《电子器件》2018年第5期1124-1129,共6页Chinese Journal of Electron Devices

基　　金：山东省职业教育与成人教育科研规划课题项目(2012zcj151)

摘　　要：针对柔性电极在发生较大形变会发生断裂,导致柔性电子产品失效的问题,提出了全新的柔性电极制备工艺。(1)利用周期性结的可拉伸性制备了一种具有褶皱构的柔性电极,实现了柔性电极在发生形变时仍能保证性能稳定、高可靠性的目标。(2)利用射频磁控溅射工艺制备了具有褶皱结构的柔性电极,实现了制备的柔性电极在30%的形变量时电阻值不会超过1 000Ω。实验结果表明:(1)提出的全新制备工艺制备的柔性电极具有一定的可拉伸性;(2)制备的性能最好的柔性电极褶皱周期超过了2.5μm,在20%形变量时电阻值低于200Ω,并且在50次重复拉伸测试中性能不会失效。For the flexible electrodes the fracture happens in large deformation,this problem led to the flexible electronics failure and the new flexible electrode preparation technology was put forward.(1)Prepared a kind of flexible electrode with the fold structure,which used periodic structure of stretchability and the achieved flexible electrode in the case of deformation the goal of stable performance and high reliability can still be guaranteed.(2)Prepared a flexible electrode having a pleated structure has realized the flexible electrodes suffer 30%of the shape variety%resistance less than 1000Ω.The experimental results show that:(1)the flexible electrodes of the new preparation process can be stretchability.(2)the best flexible electrode the fold cycle more than 2.5μm,when it suffers 20%deform the variety of resistance is less than 200Ω,and performance in 50 times repeated tensile test can keep not fail.

关 键 词：柔性电极 褶皱 磁控溅射 可拉伸性 电阻 

分 类 号：TN604[电子电信—电路与系统]