Al_2O_3陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响  

Investigation of brazing joints of Al_2O_3 ceramics to Kovar alloys by Ti+Nb/Mo metallization

作　　者：辛成来 李宁[1] 颜家振[1] XIN Chenglai;LI Ning;YAN Jiazhen(School of Manufacturing Science and Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学制造科学与工程学院,成都610065

出　　处：《焊接学报》2018年第9期45-48,131,共5页Transactions of The China Welding Institution

基　　金：航空科学基金实验室类(01)资助项目(20100119003)

摘　　要：采用磁控溅射在Al_2O_3陶瓷表面沉积了Ti+Nb/Mo金属层,实现了氧化铝陶瓷的金属化,并通过电镀镍提高了金属化效果.采用AgCu28钎料,实现了金属化Al_2O_3陶瓷与Kovar合金的可靠连接.通过扫描电子显微镜和能谱观察了钎缝的微观组织.结果表明,钎料与母材发生了明显的界面反应.Cu元素扩散进入Kovar合金,同时Ni元素扩散进入钎料的富铜区,从而促进AgCu/Kovar连接界面的形成;金属化层在Al_2O_3/AgCu钎料界面处,起到了关键作用,其中铌可以抑制脆性化合物形成,缓解残余应力.金属化层镀镍后,钎缝中AgCu共晶区明显,且钎缝较宽,对提高镀镍试样的钎焊接头强度有一定作用.Ti+Nb/Mo thin films were deposited onto Al2O3 ceramic by magnetron sputtering with a subsequent nickel-plating to ensure the robust brazing of Al2O3 ceramic to Kovar alloy using the filler of AgCu28.Microstructures of the metallization layer and the brazing joints of Al2O3/Kovar were investigated systematically by scanning electron microscopy(SEM)and energy dispersive X-ray(EDS).The results show that the interfacial reaction layers are created between filler alloys and base materials.Interdiffusion of Ni and Cu at the interface of AgCu/Kovar resulted in the formation of the reaction layer.The metallization layer plays an important role in hindering the formation of intermetallic compounds and relieving residual thermal stress at Al2O3/AgCu interface.In addition,the presence of eutectic region arising from nickelplating can improve the thickness of the brazing seam and therefore a good bonding betweenAl2O3 ceramic and Kovar was achieved.

关 键 词：氧化铝陶瓷 金属化 钎焊 磁控溅射 

分 类 号：TG454[金属学及工艺—焊接]