基于薄膜体声波谐振器的柔性有机挥发性气体传感器  

Flexible Volatile Organic Compounds Sensor Based on Thin-Film Bulk Acoustic Resonator

作　　者：江源 常烨 高传海 刘伯华 张孟伦 段学欣 JIANG Yuan;CHANG Ye;GAO Chuanhai;LIU Bohua;ZHANG Menglun;DUAN Xuexin(School of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子学院,天津300072

出　　处：《传感技术学报》2018年第10期1461-1466,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51375341);高等学校学科创新引智计划项目(B07014);国家高技术研究发展计划项目(2015AA042603)

摘　　要：制造了一种基于薄膜压电体声波谐振器的柔性有机挥发性(VOCs)气体传感器。通过转移印刷的方法,柔性体声波谐振器的电极与压电层采用的无机材料薄膜被从硅衬底上转移到超薄的聚酰亚胺基底上。该柔性谐振器的品质因数达到了1920,且在2.5 mm的弯曲半径下仅有相对于基频十万分之一左右的频率偏移。谐振器表现出了对于环己烷与乙醇气体良好的频率响应特性,且通过在器件表面修饰聚异丁烯(PIB)薄膜作为气体吸附材料,使得器件对于环己烷的响应提升了10倍以上。该柔性VOC气体传感器具有尺寸小,质量轻,机械柔性好的优点,在可穿戴环境检测设备,健康监测设备,食品变质检测的电子标签等领域有着广泛的应用前景。This work presents a flexible volatile compounds(VOCs)gas sensor based on thin-film bulk acoustic resonator.The inorganic composite membranes of the resonator are transferred from a silicon substrate to an ultra-thin polyimide(PI)substrate using transfer printing technique.The quality factor of the resonator reaches 1 920,and the frequency shift is only about one-hundred-thousandth of the fundamental frequency when the device is under a bend radius of 2.5 mm.The device shows distinct responses to cyclohexane and methanol,while the coating of polyisobutylene(PIB)as a sensitive layer further increased the response for at least 10 times.The flexible VOCs gas sensor features a small size,low weight,and good mechanical flexibility,which has a great potential to be used in a wide range of applications,including wearable environment monitor device,wearable health monitor device,electrical sensor tag for food deteriorate detection,and so on.

关 键 词：挥发性有机气体传感器 柔性电子 体声波谐振器 聚异丁烯 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]