基于双ARM的频率调制原子力显微镜  

Frequency modulated atomic force microscope based on double ARM

作　　者：高倩 王振宇[1,2] 李英姿[1,2] 张应旭[3,2] 钱建强[1,2] Gao Qian;Wang Zhenyu;Li Yingzi;Zhang Yingxu;Qian Jianqiang(School of Physics and Nuclear Energy Engineering,Beihang University,Beijing 100083,China;School of Instrumentation Science and Opto-electronic Engineering,Beihang University,Beijing 100083,China;Key Laboratory of Micro-nano Measurement and Control and Low Dimensional Physics of Ministry of Education,Beihang University,Beijing 100083,China)

机构地区：[1]北京航空航天大学物理科学与核能工程学院,北京100083 [2]北京航空航天大学微纳测控与低维物理教育部重点实验室,北京100083 [3]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《实验技术与管理》2018年第11期107-110,共4页Experimental Technology and Management

基　　金：国家自然科学基金项目(61771033)资助

摘　　要：设计了基于双ARM的频率调制原子力显微镜,以石英音叉探针作为力传感器,由自激励电路驱动探针振动在实时的共振频率处,并保持振幅恒定;采用两块ARM Cortex-M4内核的高性能微控制器进行频率解调和系统控制,频率解调采用软件锁相环设计,控制系统采用嵌入式实时操作系统CMSIS-RTOS RTX进行任务管理和调度,保证了系统的实时性。对标准样品进行扫描表明,该系统可以稳定工作。该频率调制原子力显微镜具有小型化、低成本的优势,可以被应用于教学实验。A frequency modulated atomic force microscope(FM-AFM)based on the double ARM is designed.The quartz tuning fork probe is used as the force sensor,and the self-actuating circuit drives the probe to vibrate at the real resonance frequency and keeps the amplitude constant.A high-performance microcontroller with two ARM Cortex-M4 cores is used for frequency demodulation and system control.The frequency demodulation is designed by the software phase locked loop,and the embedded real-time operating system CMSIS-RTOS RTX is adopted for the task management and scheduling in the control system,which ensures the real-time performance of the system.Scanning the standard samples shows that the system can work stably.The frequency modulated atomic force microscope has the advantages of miniaturization and low cost and can be used for teaching experiments.

关 键 词：频率调制原子力显微镜 石英音叉探针 ARM 

分 类 号：TH742[机械工程—光学工程]