基于薄膜热电堆的新型高温瞬态热流密度传感器的研制  

Development of Novel High Temperature Transient Heat-Flux Sensor Based on Thin Thermopile

作　　者：周丽丽 刘正坤[1] 宝剑光 柴葳 洪义麟[1] ZHOU Li-li;LIU Zheng-kun;Bao Jian-guang;CHAI Wei;HONG Yi-lin(National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230009, China;AVIC Aircraft Strength Research Institute, Xi’an 710065,China)

机构地区：[1]中国科学技术大学国家同步辐射实验室,合肥230029 [2]中航工业飞机强度研究所,西安710065

出　　处：《宇航计测技术》2018年第6期50-56,共7页Journal of Astronautic Metrology and Measurement

摘　　要：目前针对国内薄膜瞬态热流传感器一致性较差、制备工艺不成熟等问题,提出了一种基于光刻工艺和离子束溅射镀膜工艺的制备方法,200对T型金属薄膜热电偶沉积在10mm×10mm的水冷块上,测量1μm的氧化铝热阻层温差,从而得到瞬态热流密度值。对新型高温瞬态热流密度传感器进行比对法标定,一致性误差为0.211%,即工艺的一致性约为99.79%。实验表明,研制的新型高温瞬态热流密度传感器的一致性好,制备工艺具备良好重复性和可移植性,能够满足高温瞬态热流检测需要,为热流传感器的推广应用及标准化、批量化生产提供了良好的技术支撑。At present,aiming at the problems of poor consistency and immature preparation of transient heat flux sensor in China,this paper puts forward a kind of photolithography process and the preparation method of the ion beam sputtering coating process,two hundred pairs of T-shaped metal thin film thermocouples are deposited at 10mm×10mm water-cooled block,measuring1μm thermal resistance of the alumina temperature difference,finally the heat flux value is obtained.The new high-temperature transient heat flux sensor is calibrated by the comparison method.The consistency error of 0.211%,that is,the consistency of the process is about 99.79%.Experiments show that the novel high temperature transient heat flux sensor has very good consistency,the preparation process has good repeatability and portability,and can meet the needs of high temperature transient heat flux detection.In order to promote the application of heat flux sensors and standardize and mass produce,it provides a good technical support.

关 键 词：热流传感器 光刻工艺 薄膜 离子束 溅射 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]