基于提拉法生长激光晶体的高精度称重系统设计  

Design of high-precision weighing system based on czochralski laser crystal growth

作　　者：李建鸿 纪文刚[1] 左海涛 张睿平 金健 LI Jianhong;JI Wengang;ZUO Haitao;ZHANG Ruiping;JIN Jian(Beijing Institute of Petrochemical Technology,Beijing 102617,China;Beijing University of Chemical Technology,Beijing 100029,China)

机构地区：[1]北京石油化工学院,北京102617 [2]北京化工大学,北京100029

出　　处：《工业仪表与自动化装置》2019年第1期46-50,共5页Industrial Instrumentation & Automation

摘　　要：针对机械振动、电机转动、温度变化以及激光晶体生长固熔界面张力波动等干扰因素而导致激光晶体重量测量不准确的问题,采用具备三阶温度系数和非线性数字补偿功能的前端信号处理电路、基于双路冒泡排序的中位值均值数据滤波算法,设计了用于激光晶体生长的高精度称重系统。实验表明,系统能够较好实现晶体重量的测量,测量范围0～5 kg,分辨率0. 01 g,通过友好的人机界面实现称重系统的初始化、生长过程数据的查询与记录,体现了虚拟仪器的核心思想,系统成功应用于激光晶体实际生长,等径生长阶段控制均匀,具有良好的稳定性与精确性。In order to solve the problem of inaccurate measurement of the weight of the laser crystal due to disturbance factors such as mechanical vibration,motor rotation,temperature change,and the tension fluctuations of laser crystal growth solid solution interface and so on,a set of high-precision weighing system for laser crystal growth is designed,which use a front-end signal processing circuit with a third-order temperature coefficient and a non-linear digital compensation function and filtering algorithm of median data based on two-way bubble sort.Experiment results show that the system can achieve a good measurement of crystal weight and has a measuring range of 0~5 kg and a resolution of 0.01 g.The initialization of the weighing system and the query and recording of growth process data can be achieved through a friendly human-machine interface that embodies the core idea of virtual instruments.The system has been successfully applied to the actual growth of laser crystals with uniform control in the equal diameter growth stage that reflect good stability and accuracy.

关 键 词：激光晶体生长 称重系统 数据滤波 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]