曲折型微机电正交磁通门传感器有限元仿真分析  

Finite Element Simulation Analysis of Meandering Micro-Electro-Mechanical Orthogonal Fluxgate Sensors

作　　者：闫丽丽 支绍韬 郭磊[1,2,3] 冯竹 雷冲[1,2,3] 周勇 YAN Lili;ZHI Shaotao;GUO Lei;FENG Zhu;LEI Chong;ZHOU Yong(Shanghai Jiao Tong University,Shanghai 200240,China;Department of Micro-Nano Electronics,School of Electronic Information and ElectricalEngineering,Shanghai 200240,China;Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Shanghai 200240,China)

机构地区：[1]上海交通大学,上海200240 [2]电子信息与电气工程学院微纳电子学系,上海200240 [3]薄膜与微细技术教育部重点实验室,上海200240

出　　处：《传感技术学报》2019年第1期67-70,共4页Chinese Journal of Sensors and Actuators

基　　金：中国国家自然科学基金项目(61273065);国家科技支撑计划项目(2012BAK08B05);上海交通大学Agri-X基金项目(AgriX2015005);上海交通大学航天先进技术联合研究中心技术创新项目(USCAST2015-2);上海交通大学分析测试中心项目;上海交通大学先进电子材料与器件平台项目;航天支撑技术基金项目(15GFZ-JJ02-05)

摘　　要：正交磁通门传感器具有磁场测量范围广,对测量环境要求低等优点,被广泛应用于导航、金属探测和勘探领域。传统正交磁通门传感器灵敏度较低,限制了其应用领域的进一步拓展。一种新型的多匝曲折型磁芯结构微型正交磁通门传感器在本文中被提出,利用三维电磁场有限元仿真软件对器件性能进行了仿真分析。通过研究不同磁芯匝数对微型正交磁通门传感器性能的影响,仿真结果发现,随着磁芯匝数增加,传感器灵敏度提高,磁场响应线性范围明显增大。Orthogonal fluxgate sensors have a wide measurement range of magnetic field and low requirements for measurement environment.They are widely used in navigation,metal detection and exploration.The traditional orthogonal fluxgate has low sensitivity,which imposes certain limitations on the further development of its application field.A novel orthogonal fluxgate sensor with multi-turned meandering magnetic cores is presented in this paper.And the sensor is simulated by a three-dimensional electromagnetic field finite element simulation software.The simulation results show that as the number of core turns increases,the sensitivity and the linear range of the magnetic field response of the fluxgate sensor increases significantly together.

关 键 词：微机电系统 平面曲折型磁通门传感器 有限元分析 正交磁通门传感器 弱磁检测 

分 类 号：TN409[电子电信—微电子学与固体电子学]