二等量块检定装置概述  

Principle of Measurement Device for Gauge Block Order 2

作　　者：陈巧巧 丘卉 黄万钧 Chen Qiaoqiao;Qiu Hui;Huang Wanjun

机构地区：[1]广东省现代几何与力学计量技术重点实验室,广东广州510405

出　　处：《计量与测试技术》2019年第2期47-50,53,共5页Metrology & Measurement Technique

基　　金：广东省质监局科技项目(2016CJ05)

摘　　要：本文概述了利用激光干涉测长原理研发二等量块自动测量系统并对其进行成果验证。该装置的标准采用633nm碘饱和吸收稳频He-Ne激光器;硬件设计包括开发机械本体,搭建激光光路和信号处理模块,研发精密定位的柔性传感器、选配相关电机驱动和环境参数监控系统;软件研发包括数据采集和监控处理程序、测量结果判定及环境参数补偿软件;本装置测量范围上限100mm,测量量块的扩展不确定度为U=(0. 04～0. 08)μm(k=3)。本装置为华南地区的最高等级计量标准,对外开展长度尺寸为(0. 5～100) mm的二等量块检定业务。In this paper,an automatic measuring device of gauge block order 2 is developed,which is based on the principle of laser interference. The standard of the device is a 633 nm iodine-saturated stabilized He-Ne laser;The hardware designs consist of the development of mechanical main part,the construction of laser optical path and signal processing module,the development of precision positioning flexible sensor,the selection of related motor drive and environmental parameter monitoring system;The software development includes data acquisition and monitoring processing procedures,measurement results determination and environmental parameter compensation software;The upper limit of the measuring range of the device is 100 mm. The expansion uncertainty of the measuring block is U =( 0. 04 ~ 0. 08)μm( k = 3). This device is the highest level measurement standard in south China,and it carries out the gauge block order 2 of length range( 0. 5 ~ 100) mm verifying service.

关 键 词：量块 激光干涉 不确定度 

分 类 号：TB9[一般工业技术—计量学]