直线电机在半导体设备中的典型应用分析  

Linear Motor Analysis in Semiconductor Equipment Application

作　　者：赵立华[1] 谭立杰[1] 黄卫国[1] 石艺楠[1] 张永昌 ZHAO Lihua;TAN Lijie;HUANG Weiguo;SHI Yinan;ZHANG Yongchang(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2019年第2期16-19,共4页Equipment for Electronic Products Manufacturing

摘　　要：随着直线电机理论和产业的逐渐成熟,其在半导体设备中的应用也越来越广泛;两种典型结构直线电机,即U型电机、平板电机,具有结构简单、高响应特性和高精度等特点,从设计选型、抗干扰和精度控制等几方面举例分析。With the maturity of linear motor theory and industry,its application in semiconductor equipment is more and more extensive. Two different typical structure linear motors have simple structure and quick response characteristics and high accuracy,such as U-type motor and flat-type. This paper analyzes motor choose and anti-interference and precision control in equipment real application.

关 键 词：直线电机 半导体设备 原理 应用分析 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]