离子束刻蚀机电控系统设计  

作　　者：许钊 薛鹏[1] 

机构地区：[1]长春工业大学,吉林长春130000

出　　处：《科技创新与应用》2019年第13期95-96,共2页Technology Innovation and Application

摘　　要：运动控制系统是实现离子束刻蚀机控制算法和轨迹拟合算法的硬件基础,因此需要在传动运动控制系统上,进行进一步的研究,以满足离子束刻蚀机刻蚀闪耀曲面光栅的要求,文章按照离子束刻蚀机运动控制系统的功能要求设计了工作平台的电控系统,首先介绍了电控系统的结构和功能模块布置,之后分别对电控系统的四个主要功能模块的软件和硬件电路进行设计,分别为:供电模块、真空获得模块、运动控制模块、通讯模块。为实现离子束刻蚀机控制算法和轨迹拟合算法提供了实际实验平台基础。The motion control system is the hardware basis to realize the control algorithm and trajectory fitting algorithm of ion beam etching machine. therefore, further research needs to be carried out on the transmission motion control system to meet the requirements of ion beam etching machine etching blazed surface gratings. In this paper, the functional requirements of the motion control system of ion beam etching machine are studied. the electronic control system of the working platform is designed. Firstly, the structure and functional module arrangement of the electronic control system are introduced. Then, the software and hardware circuits of the four main functional modules of the electronic control system are designed, which are: power supply module, vacuum acquisition module, motion control module, communication module. It provides a practical experimental platform for the realization of ion beam etching machine control algorithm and trajectory fitting algorithm.

关 键 词：步进电机 硬件设计 运动控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]