相对法校准真空漏孔及不确定度的评定  

A relative method for calibrating vacuum leak and uncertainty assessment

作　　者：刘兴胜[1] 解永蓉[1] 郑颖[1] 费渭南[2] LIU Xing-sheng;XIE Yong-rong;ZHENG Ying;FEI Wei-nan(Institute of Electronic Engineering, CAEP, Mianyang 621900, China;National Institute of Metrology, Beijing 100013, China)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900 [2]中国计量科学研究院,北京100013

出　　处：《真空》2019年第2期66-68,共3页Vacuum

摘　　要：相对法校准真空漏孔是通过比较四极质谱计采集的电流值,根据已知标准漏孔漏率计算出被校真空漏孔漏率的一种方法。使用真空漏率校准装置,能方便的校准真空漏孔,且不确定度符合量值传递要求,满足了实际需要。主要介绍了相对法校准真空漏孔的原理,过程及不确定度的评定。A relative method for calibrating vacuum leak is to compare collection current of quadruple mass spectrometer.According to the known standard leakage rate, the leakage rate of vacuum leak can be calculated. Use the calibration device of vacuum and leak rate, it can conveniently calibrate the vacuum leak, makes the uncertainty conforming to the requirement of values transfer, and satisfy actual requirement. This paper mostly introduces the theory, process of relative method for calibrating vacuum leak and uncertainty assessment.

关 键 词：相对法 真空漏孔 校准原理 校准过程 不确定度 

分 类 号：TB75[一般工业技术—真空技术]