飞秒激光跟踪仪跟踪光路的优化设计与分析  

Optimal Design and Analysis of Tracking Optical Paths in Femtosecond Laser Tracker

作　　者：劳达宝[1,2] 崔成君 王国民 周维虎 Lao Dabao;Cui Chengjun;Wang Guomin;Zhou Weihu(Academy of Opto-Electronics,Chinese Academy of Sciences,Beijing 100094,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电研究院,北京100094 [2]中国科学院大学,北京100049

出　　处：《中国激光》2019年第3期184-191,共8页Chinese Journal of Lasers

基　　金：国家重点研发计划重大科学仪器设备开发专项(2017YFF0107300);中科院重点部署项目(KFZD-SW-415-1);中科院院装备研制项目(YZ201618);国家重大科学仪器设备开发专项(2011YQ120022)

摘　　要：基于光学系统对跟踪探测的影响,结合仪器功能,提出了一种基于胶合透镜减小跟踪偏移量的方法,实现了对飞秒激光跟踪仪跟踪光路的优化;改进了准直扩束光路,细化了光学系统,分析了优化后光学系统在接收功率和杂光方面对跟踪探测的影响机理。基于优化的光学系统设计,搭建实验系统进行了探测实验。实验结果表明,补偿后的跟踪探测精度可达3μm,这满足仪器精密跟踪要求。Based on the analysis of the influence of optical system on tracking detection and combined with the instrumental functions,a smart method based on glued lens is proposed to reduce tracking offsets.The tracking optical path in the femtosecond laser tracker is optimized.At the same time,the optical path for collimation and expanding is improved,and the optical system is refined.The influence mechanism of receiving laser power and stray light in the optimized optical system on tracking detection is analyzed in detail.Based on the optimal design of the optical system,the experimental system is established and the detection experiment is conducted.The research results show that the tracking detection accuracy can reach 3μm after compensation,which meets the precision tracking requirements of instruments.

关 键 词：测量 光路优化 激光跟踪 位置灵敏探测器激光跟踪仪 杂散光 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]