热阴极电离真空计电参数校准装置电流源设计与仿真分析  

Design and Analysis of Current Source for Hot Cathode Ionization Vacuum Gauge Electrical Parameter Calibration Device

作　　者：邵壮 延峰 柏向春[1,2] 董云宁 宋瑞海 魏萌萌 卢耀文[1,2] Shao Zhuang;Yan Feng;Bai Xiangchun;Dong Yunning;Song Ruihai;Wei Mengmeng;Lu Yaowen(Beijing Engineering Technology Research Center of Vacuum Measurement and Test, Beijing 100029, China;Beijing Orient Institute of Measurement and Test, Beijing 100086, China)

机构地区：[1]北京市真空计量检测工程技术研究中心,北京100029 [2]北京东方计量测试研究所,北京100086

出　　处：《真空科学与技术学报》2019年第4期297-303,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：针对热阴极电离真空计电参数校准装置中电流源设计的关键技术,本文提出一种用于真空计电参数校准的内置单运放电流源及其非理想化低频等效模型,并通过PSPICE仿真对电路性能进行分析。装置适用于100MQ^100GQ负载条件,负载为1GQ时输出电流相对变化率为0.3×10%解决了当前热阴极电离真空计电参数校准装置电流源不适用于低位离子流采样的超高电离真空计的问题,达到校准不同型号热阴极电离真空计离子流放大器的效果,为电参数校准装置的研制提供理论依据及参考。In view of the current source design technology used in hot cathode ionization vacuum gauge electrical parameter calibration device, a single OPAMP based power supply is proposed. And a non-idealized model is set up to analyze the power supply as mentioned. The correctness of the model is verified by PSPICE simulation, and a comprehensive simulation analysis of the circuit performance is performed. The relative change rate of the output current at 1 Gfl is 0. 3 ppm and the device adapt to 100Mil .100GQ load. The device as mentioned solves the problem that the current source of the hot cathode ionization vacuum gauge electric parameter calibration device is not suitable for the ultra-high ionization vacuum gauge of low-position ion current sampling. It has the ability to cali丒 brate different types of hot cathode ionization vacuum gauge ion current amplifiers and provides theoretical basis and reference for the development of ionization vacuum gauge electrical parameter calibration device.

关 键 词：电离真空计 校准装置 电参数 PSPICE仿真 

分 类 号：TB77[一般工业技术—真空技术]