K9玻璃基底的宽光谱特性椭偏法研究  

Study on Broad Spectral Properties of K9 Glass Substrate by Ellipsometry

作　　者：唐帆斌 Tang Fanbin(Public Education Department,Nanning College,Nanning,Guangxi 530200)

机构地区：[1]南宁学院公共教学部,南宁广西530200

出　　处：《中阿科技论坛（中英阿文）》2019年第1期60-63,J0078-J0081,共5页China-Arab States Science and Technology Forum

基　　金：南宁学院校级科研项目(2017XJ09)~~

摘　　要：为了获得K9玻璃基底的光学常数,采用德国SENTECH生产的SE850宽光谱反射式光谱型椭偏仪,测量和分析了K9玻璃基底,得到了K9玻璃在380nm～2300nm宽光谱上的光学常数曲线。分别测量了在入射角为60o、65o和70o下的椭偏曲线,采用最简单的"基底/空气"模型进行拟合,选用最适合描述非晶半导体的Tauc-Lorentz色散公式对于K9玻璃进行模型拟合,在入射角为70o时得到最小的均方差(MSE),同时获得K9玻璃在380nm～2400nm光谱范围内的折射率曲线。In order to obtain the optical constant of K9 glass substrate, the SE850 broad spectral reflectance type ellipsometer produced by SENTECH in Germany was used to measure and analyze the K9 glass substrate, and the optical constant curve of K9 glass on the 380 nm(2300 nm) wide spectrum was obtained. Elliptical curves with incident angles of 60°, 65°, and 70° were respectively measured, the simplest base/air model was adopted for fitting, chose the most appropriate description of amorphous semiconductor Tauc-lorentz dispersion formula model fitting for K9 glass, when the incident Angle was70 °, got minimum mean square error(MSE), at the same time, the refractive index curve of K9 glass in the spectral range of 380 nm-2400 nm was obtained.

关 键 词：K9 玻璃 椭偏仪 折射率 

分 类 号：TQ171.1[化学工程—玻璃工业]