微机械陀螺冲击特性及可靠性研究  

Research on the Impact Characteristics and Reliability of a MEMS Gyroscope

作　　者：何春华[1,2] 赵前程 杨振川[1] 张大成[1] 闫桂珍[1] HE Chunhua;ZHAO Qiancheng;YANG Zhenchuan;ZHAND Dacheng;YAN Guizhen(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Institute of Microelectronics,Peking University,Beijing100871,China;Midea Group co.,Ltd,FoshanGuangdong,528311 China)

机构地区：[1]北京大学微电子学研究院微米/纳米加工技术国家级重点实验室,北京100871 [2]美的集团,广东佛山528311

出　　处：《传感技术学报》2019年第5期643-648,共6页Chinese Journal of Sensors and Actuators

摘　　要：为了深入掌握微机械陀螺的冲击响应特性,本文进行了详细的理论推导和MATLAB仿真分析,并进行了测试验证。冲击试验结果表明,理论分析和试验结果基本一致,考虑最坏情况可知,当脉宽对应的冲击频率与陀螺固有频率越接近,并且陀螺品质因子和冲击加速度幅值越大时,则冲击带来的影响就越大,梁越容易发生断裂失效。因此要使MEMS陀螺具有较强的抗冲击能力,必须综合优化设计陀螺的真空度和固有频率。In order to grasp the shock response characteristics of a MEMS gyroscope,the theoretical deduction and MATLAB simulation analysis are carried out in detail in this paper,and the test verification is also accomplished. Experimental results show that the theoretical analysis results accord with those of the experiments. Considering the worst case,the closer the impact frequency is to the natural frequency of the gyroscope,and the greater the quality factor and the impact acceleration amplitude are,the greater the impact influence will be. Therefore,in order to make the gyroscope have strong impact resistance,it is necessary to optimize the vacuum degree and natural frequencies of the gyroscope comprehensively.

关 键 词：微机械陀螺 冲击可靠性 响应模型 冲击特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]