基于三维光电传感器的接触式探头优化设计  

Optimal design of touch probe based on 3D optoelectronic sensor

作　　者：靳夏文 李瑞君[1] 王鹏宇[1] JIN Xiawen;LI Ruijun;WANG Pengyu(School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院

出　　处：《合肥工业大学学报（自然科学版）》2019年第5期617-620,共4页Journal of Hefei University of Technology：Natural Science

基　　金：国家自然科学基金资助项目(51675157;51805136)

摘　　要：文章设计了一种适用于微纳米三坐标测量机(coordinate measuring machine,CMM)的光学接触式探头,介绍了该探头的结构和原理,并建立了探头的灵敏度模型;依据三维方向等刚度和等灵敏度的原则,得出了探头结构的最优参数;对探头刚度进行仿真验证,并对探头在三维方向上的灵敏度和重复性进行了测试。实验结果表明,探头在三维方向灵敏度约为0.26V/μm,灵敏度近似相等且线性度良好,重复性优于14nm。An optical touch probe for micro/nano coordinate measuring machine(CMM) was designed. The structure and the principle of the probe were introduced, and the sensitivity model was established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The sensitivity and repeatability of the probe were tested. The experimental results show that the probe has uniform sensitivity(about 0.26 V /μm) and good linearity in 3D, and the repeatability of the probe is less than 14 nm.

关 键 词：微纳米三坐标测量机(CMM) 接触式探头 参数优化 灵敏度 刚度 重复性 

分 类 号：TB921[一般工业技术—计量学]