计量电镜中纳米位移台控制方法研究  

Research on control method of nano-displacement table in metrology electron microscope

作　　者：李雪 殷伯华[1,3] 许广鹿 韩立 刘俊标[1,3] LI Xue;YIN Bo-hua;XU Guang-lu;HAN Li;LIU Jun-biao(Institute of Electrical Engineering,Chinese Acadme y of Sciences,Beijing 100190;University of Chinese Academy of Sciences,Beijing 100049;Beijing Key Laboratory of Bioelectromagnetism,Beijing 100190,China)

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院大学,北京100049 [3]生物电磁学北京市重点实验室,北京100190

出　　处：《电子显微学报》2019年第3期228-235,共8页Journal of Chinese Electron Microscopy Society

基　　金：科技部重大科学仪器设备开发专项(No.2017YFF0105904);中国科学院仪器研制项目(No.GJJSTD20170004)

摘　　要：针对计量型扫描电镜成像方法的特殊需求,提出了一种新型的纳米位移台扫描运动控制方法。利用乘法DA控制方法实现了纳米位移台驱动信号的整形输出。利用该模拟信号实现了纳米位移台的扫描范围的增益控制,扫描图像的旋转和偏移控制。该控制方法有效地的保持了纳米位移台的步进位移分辨力,克服了传统纳米位移台控制系统损失纳米步进精度的缺点。通过实验验证了此位移台控制新方法的可行性,位移台移动方式和理论吻合。A new scanning motion control method for nanometer displacement table is proposed to meet the special needs of the metrological scanning electron microscope (SEM) imaging method. The shaping output of the nano-stage driving signal is realized by the multiplication DA control method. Using this analog signal, the gain control of scanning range, rotation and offset control of scanning image are realized. This control method effectively keeps the step displacement resolution of the nanometer displacement table and overcomes the shortcoming of the traditional nanometer displacement platform control system which loses the nanometer step precision. The feasibility of the new method is verified by experiments, and the movement mode of the displacement table is in agreement with the theory.

关 键 词：纳米位移台 定位精度 纳米步进 DSP控制 角度旋转 

分 类 号：TN16[电子电信—物理电子学] TG115.215.9[金属学及工艺—物理冶金]