基于镜组准直的激光干涉仪快速对光方法研究  

Study of laser interferometer’s fast optical path collimation method based on collimation of mirror group

作　　者：宋嘎[1] 叶佩青 SONG Ga;YE Peiqing(YE Peiqing Expert Studio,Shandong Vocational College,Jinan 250104,CHN;Department of Mechanical Engineering,Tsinghua University,Beijing 100084,CHN)

机构地区：[1]山东职业学院叶佩青专家工作室,山东济南250104 [2]清华大学机械工程系,北京100084

出　　处：《制造技术与机床》2019年第6期150-153,共4页Manufacturing Technology & Machine Tool

基　　金：山东省高等学校科研发展计划项目(J17KB036);山东省职业教育技艺技能传承创新平台(智能制造技艺技能传承创新平台)资助项目

摘　　要：为了解决激光干涉仪使用时激光光路准直调整比较费时的问题,在对激光干涉仪位置测量原理和测量误差进行分析的基础上,通过反复比较验证,提出了一种基于镜组准直的快速对光方法。实践表明,该方法简单实用,能够有效指导操作人员高效准确地完成对光,具有较强的指导作用。In order to solve the time-consuming problem of collimation adjustment of laser optical path when laser interferometer is used,through repeated comparison and verification,a fast optical path collimation method based on collimation of mirror group is proposed on the basis of analysis of position measurement principle and measurement error of laser interferometer.Practice shows that this method is simple and practical,can effectively guide operators to complete laser optical path collimation efficiently and accurately,has a strong guiding role.

关 键 词：激光干涉仪 镜组准直 测量误差 对光 

分 类 号：TG659[金属学及工艺—金属切削加工及机床]