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作 者:尚勇 钟朝位[1] 李欣源 SHANG Yong;ZHONG Chaowei;LI Xinyuan(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China)
机构地区:[1]电子科技大学电子薄膜与集成器件国家重点实验室
出 处:《电子元件与材料》2019年第6期26-31,共6页Electronic Components And Materials
基 金:国家自然科学基金(51202021)
摘 要:在不添加熔融玻璃的情况下,采用一次预烧法制备了低温烧结的K2O-B2O3-SiO2-Al2O3复合材料,并系统地讨论了BaO含量对复合材料微观结构、物相组成、介电性能、弯曲强度和热膨胀系数的影响。X射线衍射结果表明复合材料的主晶相为石英相,次晶相为氧化铝相。除此之外,研究结果表明调整BaO含量有利于获得良好的烧结性能。当BaO质量分数为5%时,在850℃烧结的复合材料在14GHz下的相对介电常数(εr)为5.42,介电损耗为3.6×10^-3,热膨胀系数(TEC)为8.4×10^-6/℃,弯曲强度为158MPa。这为制备新型的LTCC材料提供了一种有效的方法,具有广阔的应用前景。Without the addition of glass materials, K2O-B2O3-SiO2-Al2O3 composites were sintered at temperature less than 900 ℃ by a novel and effective pre-sintering method. Meanwhile, the effects of the BaO content on the microstructure, phase and dielectric properties of the composites were discussed systematically. The X-ray diffraction (XRD) show that the main crystalline phase is SiO2 and the secondary phase is Al2O3. In addition, the measured results reveal that the adjustment of BaO content leads to the improvement of the sintering properties. As BaO content increases to 5%, the composite sintered at 850 ℃ has a dielectric constantof5.42andtanδof3.6×10^-3at14GHz, thermalexpansioncoefficient(TEC)of8.4×10^-6/℃, andflexuralstrengthof 158 MPa. This work provides an effective approach for preparing the novel composites as a promising candidate for LTCC applications.
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