静态累积比较法真空漏孔校准方法研究  

Study on static cumulative comparison calibration method of vacuum leak

作　　者：赵澜[1] 成永军[1] 孙雯君[1] 陈联[1] 冯天佑[1] 吉康[1] ZHAO Lan;CHENG Yong-jun;SUN Wen-jun;CHEN Lian;FENG Tian-you;JI Kang(Lanzhou Institute of Physics,Primary Standard Laboratory of Vacuum NDM,Lanzhou,730000,China)

机构地区：[1]兰州空间技术物理研究所

出　　处：《真空》2019年第3期44-47,共4页Vacuum

基　　金：国家自然科学基金项目(61471184)

摘　　要：静态累积比较法校准真空漏孔是通过四极质谱计测量标准气体流量计与被校真空漏孔累积过程中离子流变化量而实现的。本文主要介绍了静态累积比较法真空漏孔的校准方法、装置原理、校准过程、校准结果的处理等,并提出了减小测量不确定度的影响因素。Static cumulative comparison calibration method is compared variation of ion currents using quadruple mass spectrometer between standard gas flow by provided gas flow meter and leakage by provided calibrated vacuum leak during static accumulation, and leak leakage is gained. In this paper static cumulative comparison calibration method, apparatus principle,calibration results are introduced, and influence factor for reducing measurement uncertainty is provided.

关 键 词：静态累积比较 真空漏孔 校准方法 

分 类 号：TB774[一般工业技术—真空技术]