电子级磷酸研发现状及芯片级磷酸展望  

Research Progress on electronic-grade phosphoric acid and prospects of microchip-grade phosphoric acid

作　　者：范相虎 周聪[1] 袁军[1] 郭嘉[1] FAN Xiang-hu;ZHOU Cong;YU AN Jun;GUO Jia(Key Laboratory of Green Chemical Process Ministry of Education, Wuhan Institute of Technology, Wuhan Hubei430205, China)

机构地区：[1]武汉工程大学绿色化工过程教育部重点实验室

出　　处：《粘接》2019年第5期61-64,共4页Adhesion

摘　　要：由于液晶显示器(LCD)工业和半导体芯片工业在中国迅速普及,用于清洗和蚀刻的电子级磷酸的需求正在日益增加,对磷酸中金属离子含量的要求也越来越高,为满足中国对电子级磷酸的需求,此方向成为许多研究学者研究的重点。本文介绍了近年来电子级磷酸的研发现状,以及在LCD工业和半导体芯片工业的应用,并对芯片级磷酸进行了展望。With the rapid development of liquid crystal display(LCD) industry and semiconductor chipindustry in China, the demand for electronic-grade phosphoric acids is increasing day by day,and the purity requirement for phosphoric acid is also getting higher and higher. At present,it has become a hot-point of fine phosphorus chemical research. In this paper,the recent research progresses on electronic-grade phosphoric acid and their applications for LCD industry and semiconductor chip industry were introduced,and the prospects of microchip-grade phosphoric acid were discussed.

关 键 词：电子级磷酸 制备 应用 芯片级 

分 类 号：TQ402[化学工程]