磁控溅射制备V2O5薄膜及全固态薄膜锂电池研究  

Study on the preparation of V2O5 thin films and all solid state thin film lithium batteries obtained by magnetron sputtering

作　　者：王胜利[1] 傅方樵 桑林[1] 丁飞[1] WANG Sheng-li;FU Fang-qiao;SANG Lin;DING Fei(Science and Technology on Power Sources Laboratory, Tianjin Institute of Power Sources, Tianjin)

机构地区：[1]中国电子科技集团公司第十八研究所化学与物理电源重点实验室

出　　处：《电源技术》2019年第6期909-911,927,共4页Chinese Journal of Power Sources

摘　　要：V2O5具有容量高、循环稳定、易于制备成薄膜等特点,是全固态薄膜锂电池理想的正极材料。采用磁控溅射法,以V2O5为靶材制备了薄膜,研究了溅射气体Ar/O2对薄膜结构、形貌及电化学性能的影响,优化了薄膜制备工艺。最终采用磁控溅射法依次沉积集流体薄膜、钒氧化物薄膜、固态电解质薄膜,真空热蒸发金属锂薄膜,成功制备了Al/V2O5/Li P ON/Li/Cu全固态薄膜锂电池。薄膜电池在1.7~3.4 V电压范围内,以10μA/cm2恒电流充放电测试,电池比容量达到25μAh/cm2,稳定循环超过500次。V2O5 is an ideal cathode material for all solid state thin film lithium battery, which has the characteristics of high capacity, stable circulation and easy to prepare into thin film. The films were prepared by RF magnetron sputtering with V2O5 target. The effect of sputtering gas Ar/O2 on the structure, morphology and electrochemical performance of the films was studied, and the preparation process of the films was optimized. Finally, the Al/V2O5/LiPON/Li/Cu solid state thin film lithium battery was successfully prepared by magnetron sputtering followed by deposition of collector films, V2O5 thin film, solid state electrolyte thin film and vacuum thermal evaporation of lithium metal thin film. The battery was tested in the range of 1.7~3.4 V voltage, with 10 μA/cm2 constant current. The specific capacity of the battery reached 25 μA/cm2, and the stable cycle numbers were more than 500 times.

关 键 词：磁控溅射 V2O5薄膜 全固态薄膜锂电池 

分 类 号：TM912[电气工程—电力电子与电力传动]