石英半球谐振子精密成型技术  

Precision Forming Technology of Quartz Hemispherical Harmonic Oscillator

作　　者：马志奎 赵宏宝 赵万良 宋学富 陈效真[4] MA Zhi-kui;ZHAO Hong-bao;ZHAO Wan-liang;SONG Xue-fu;CHEN Xiao-zhen(Xi'an Hangchen Electromechanical Technology Co.,Ltd,Xi'an 710311;Shanghai Aerospace Control Technology Institute,Shanghai 201109;China Building Materials Academy,Beijing 100024;Beijing Institute of Aerospace Control Devices,Beijing 100039)

机构地区：[1]西安航晨机电科技股份有限公司,西安710311 [2]上海航天控制技术研究所,上海201109 [3]中国建筑材料科学研究总院有限公司,北京100024 [4]北京航天控制仪器研究所,北京100039

出　　处：《导航与控制》2019年第2期77-83,95,共8页Navigation and Control

摘　　要：石英半球谐振陀螺以其轻质、低功耗、长寿命、高可靠、应用精度范围宽、成本低等优势,引起了惯性技术界的瞩目。半球谐振陀螺的核心器件——石英半球谐振子的成型技术是当前的研究重点。经不断试验和摸索,以范成球面弹性展成为基础,通过均衡磨削原则、磨头最大包络原则和三阶段37道工序的精细优化工艺流程,较好地实现了高精度微应力硬脆石英谐振子异形薄壁件的成型,形成了专用的结构成型中心,为石英半球谐振陀螺的核心半球谐振子球壳成型开创了一条可行途径。Quartz hemispherical resonator gyroscope has attracted the attention of inertial technology field due to its advantages of light weight, low power consumption, long lifetime, high reliability, wide application precision and low cost.Nowadays, formation technology of quartz hemispheric harmonic oscillator which is the core device of hemispherical resonator gyroscope is the focus of the research. Based on generation method of elastic growth of spherical surface, through the balanced grinding principle, the maximum envelope principle of grinding head and the fine optimization process of 37 stages, the forming of high-precision hard-brittle quartz harmonic oscillator special-shaped thin-walled parts with micro-stress has been well solved, and a special structure forming center has been formed. A feasible way is put forward for the fonnation of hemispherical harmonic oscillator spherical shell which is the core of quartz hemispheric resonant gyroscope.

关 键 词：半球谐振陀螺 谐振子 球壳精密制造 范成法 包络原则 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH706[机械工程—仪器科学与技术]