铬原子感生荧光稳频频率稳定性的分析（英文）  

Characterization of frequency stabilization based on laser induced fluorescence in laser-focused atomic deposition with chromium

作　　者：张彤 殷聪[2] 赵跃进 钱进[2] 王建波[2] 石春英[2] ZHANG Tong;YIN Cong;ZHAO Yuejin;QIAN Jin;WANG Jianbo;SHI chunying(Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology , Beijing 100081, China;National Institute of Metrology , Division of Metrology in Length and Precision Engineering ,Length Quantum Standards Lab Beijing100029 China)

机构地区：[1]北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室,北京100081 [2]中国计量科学研究院长度所长度量子实验室,北京100029

出　　处：《光学技术》2019年第3期257-262,共6页Optical Technique

摘　　要：激光会聚铬原子沉积实验所需时间可长达几十分钟至几个小时,实验过程中要求激光频率的波动小于5MHz,感生荧光稳频技术能够解决原子沉积实验中激光频率漂移的问题。为了保证激光频率的长时间稳定性,对稳频系统的误差信号随激光功率及原子炉温度的变化情况进行了研究。结果显示,在光强为8mW,原子炉温度为1923K时,激光频率的长期漂移可抑制到最小,在200分钟内的频率波动仅有±0.6MHz。同时,重复实验的结果也表明稳频系统具有很好的稳定性,从而为原子沉积技术提供了保障,并提高了沉积实验的重复性。Laser stabilization based on laser induced fluorescence plays an important role in laser-focused atomic deposition. However there’s seldom measurement of the stability of this system and the long-term frequency stability since the deposition process may last from tens of minutes to several hours. Measurements on the characters of laser stabilization based on Laser induced fluorescence(LIF) signals is proposed in this paper. Laser fluctuations for a range of laser intensities and thermal evaporation temperatures was measured with a calibrated commercial wavemeter. The optimal performance of this system happened when laser intensity was 8 mW and temperature was 1923 K. The frequency fluctuations in 200 min was suppressed to ±0.6 MHz near the atomic resonance transition. The stability of this system was also measured in multi-experiments, it turned out that this technique provides the condition for repeated atomic deposition experiments and the high success rate.

关 键 词：激光稳频 感生荧光 原子光刻 

分 类 号：TN249[电子电信—物理电子学] O433[机械工程—光学工程]