大尺寸氧化铝陶瓷导轨超精研抛工艺研究  

Ultra-precision grinding and polishing method of large-scale Al2O3 ceramic guides

作　　者：刘剑 蔡黎明[3] 成贤锴[3] 顾国刚[3] 于涌[3] LIU Jian;CAI Li-ming;CHENG Xian-kai;GU Guo-gang;YU Yong(Changchun University of Science and Technology,Changchun 130022,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences,Suzhou 215163,China)

机构地区：[1]长春理工大学,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [3]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《中国光学》2019年第3期663-669,共7页Chinese Optics

基　　金：苏州市应用基础研究项目(No.SYG201322)~~

摘　　要：为了提高氧化铝陶瓷导轨超精密研抛加工的工作效率,分析了研抛压力、研抛速度以及磨料添加间隔等工艺参数与研磨抛光效率的关系。首先,根据氧化铝陶瓷导轨的特性及物理参数,确定研磨抛光盘以及磨料的选型。然后以高精度平面平晶作为检测工具,平晶与导轨表面形成干涉条纹,利用条纹的数量定量表征研抛效果。最终得到氧化铝陶瓷导轨的最佳工艺参数:每个研抛压力应该控制在40 N;研抛线速度为45 m/min;研磨剂的添加时间为30 min。在同等时间内,应用此套工艺参数可以达到更高的面型精度。In order to improve the ultra-precision polishing efficiency of Al2O3 ceramic guides,the relationship between polishing parameters such as polishing pressure,polishing speed,abrasive added interval and polishing efficiency was analyzed.Firstly,the polishing discs and abrasive material were selected based on the physical parameters and characteristics of Al2O3 ceramic guide.Secondly,taking the high precision plane parallel crystal as the detection tool,the number of stripes between the crystal and guide were quantitatively used to determine the polishing efficiency.At the end,the best processing parameters for the Al2O3 ceramic guide were obtained:polishing pressure should be controlled to be around 40 N;the line speed of polishing should be 45 m/min;a grinding agent should be added every 30 minutes.Within the same amount of time,this set of process parameters will obtain higher surface accuracy.

关 键 词：高精度 陶瓷导轨 超精研抛 

分 类 号：TH163[机械工程—机械制造及自动化] TH1621