纳米位置控制系统自适应滤波器设计  

Design of the Self-adaptive Filter for Nanometer Positioning Control System

作　　者：侯静[1,2] 刘涛 刘金鑫[4] 韩子扬[1] HOU Jing;LIU Tao;LIU Jin-xin;HAN Zi-yang(School of Information and Control Engineering,Shenyang Jianzhu University,Shenyang 110168,China;College of Information Science and Engineering,Northeastern University,Shenyang 110004,China;Department of Information and Control Engineering,Shenyang Institute of Science and Technology,Shenyang 110167,China;Laboratory of Information Service and Intelligent Control,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China)

机构地区：[1]沈阳建筑大学信息与控制工程学院,辽宁沈阳110168 [2]东北大学信息科学与工程学院,辽宁沈阳110004 [3]沈阳科技学院信息与控制工程系,辽宁沈阳110167 [4]中国科学院沈阳自动化研究所信息服务与智能控制研究室,辽宁沈阳110016

出　　处：《控制工程》2019年第6期1153-1157,共5页Control Engineering of China

基　　金：国家自然科学基金资助项目(61440004)

摘　　要：纳米位置控制系统由于其控制精度达到纳米级,因此合理选择数字滤波器类型,正确设计数字滤波器算法是保证纳米控制系统定位精度的重要因素,但现有用于纳米位置控制系统的噪声滤波器采用传统的带阻滤波器,其参数固定。一旦纳米位置控制系统发生移动或者改变负载,噪声特性将随之发生变化,因此,常规定常数的滤波器难以有效滤除系统噪声。针对该问题,采用文化算法和案例推理技术,提出了纳米位置控制系统带阻滤波器参数自适应整定方法。实验结果证明提出的数字带阻滤波器的能够有效滤除纳米位置控制系统中的系统机械结构噪声,有效保证了系统的稳定性。In nanometer positioning control system, the control precision is nanoscale. The type and the algorithm of digital filter are the important factors to ensure the positional accuracy. But currently, the filter used in the nanometer positioning system is adopted traditional band stop filter with fixed parameters. When the nano position control system moves or the load is changed, the noise characteristics will change, and then the conventional fixed constant filter cannot effectively eliminate system noise. In order to resolve the problem an adaptive adjustment method of band stop filter which combined culture algorithm and case based reasoning is proposed. The experimental results prove that the proposed filter can effectively eliminate the system mechanical structure noise and guarantee the stability of the nanometer positioning control system.

关 键 词：滤波器 纳米位置控制 文化算法 案例推理 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]