微纳结构柔性压力传感器的制备及应用  

Fabrication and Application of Flexible Pressure Sensors with Micro/Nano-Structures

作　　者：熊耀旭 胡友根[1] 朱朋莉[1] 孙蓉[1] 汪正平[3] Yaoxu Xiong;Yougen Hu;Pengli Zhu;Rong Sun;Ching-Ping Wong(Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055,China;Shenzhen College of Advanced Technology,University of Chinese Academy of Sciences,Shenzhen 518055,China;Georgia Institute of Technology,Georgia 30332,USA)

机构地区：[1]中国科学院深圳先进技术研究院,深圳518055 [2]中国科学院大学深圳先进技术学院,深圳518055 [3]佐治亚理工学院,美国佐治亚州30332

出　　处：《化学进展》2019年第6期800-810,共11页Progress in Chemistry

基　　金：国家自然科学基金项目(No.61701488,21571186);深圳市基础研究项目(No.JCYJ20170818162548196);国家地方联合工程实验室项目(No.2017-934);中国科学院深圳先进技术研究院优秀青年基金项目(No.2016005)资助~~

摘　　要：柔性压力传感器是一种能够感知或监测外界压力变化的柔性电子器件,具备灵敏度高、形变灵活、制备工艺简单等特点,在可穿戴式电子产品、健康医疗、软体机器人、人机交互等新兴领域具有广泛而重要的应用。灵敏度、检测极限、响应时间与循环工作稳定性是柔性压力传感的核心性能指标,微纳结构的引入对提高柔性压力传感器综合性能具有重要作用。本文根据微纳结构的主要类型介绍了基于微纳结构的柔性压力传感器的最新研究进展,包括各种不同形貌微纳结构对柔性压力传感器性能的影响及其在柔性压力传感器中的应用,并对柔性压力传感器未来的发展提出展望。As one of flexible electronic devices,flexible pressure sensors have many merits such as high sensitivity,excellent flexibility and facile fabrication process,and they have been widely used in many burgeoning fields including wearable devices,health care,soft robots,human-machine interaction,etc.Sensitivity,detection limit,response time and cyclic stability are the key parameters of the flexible pressure sensors,and the introduction of micro/nano-structures into flexible pressure sensors will play an important role in improving their comprehensive performance.Based on the main types of micro-nano structure,this review introduces the latest research progress of flexible pressure sensors,including the influence of various morphological micro-nano structures on the performance of flexible pressure sensors and their applications in flexible electronics.Moreover,the prospect of their future development is also outlined.

关 键 词：柔性电子 柔性压力传感器 微纳结构 压阻式 电容式 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]