石墨烯纳机电系统及其与光纤的集成研究  

Graphene Nanoelectromechanical System and Its Integration with Optical Fiber

作　　者：刘增勇 曹鸿谦 徐飞[1] 陆延青[1] Liu Zengyong;Cao Hongqian;Xu Fei;Lu Yanqing(College of Engineering and Applied Science,Nanjing University,Nanjing,Jiangsu 210093,China)

机构地区：[1]南京大学现代工程与应用科学学院

出　　处：《激光与光电子学进展》2019年第11期38-45,共8页Laser & Optoelectronics Progress

基　　金：科技部国家重点研发计划课题(2017YFC1403800);国家自然科学基金重点项目(61535005)

摘　　要：石墨烯具有比表面积大、弹性模量大、刚度大和密度低等特性,是极佳的纳机电系统(NEMS)基础材料。石墨烯纳机电系统主要研究石墨烯薄膜的机电性能,其共振频率对质量、力和热具有非常灵敏的响应,在传感领域具有广泛的应用前景。光纤传感器已得到广泛应用,二者相结合能够发挥更大的优势。本文主要对石墨烯纳机电系统的工作原理、制备工艺、传感应用和基于光纤的石墨烯纳机电系统传感器进行了综述与展望。Graphene is an excellent base material for a nanoelectromechanical system(NEMS)because of its extraordinary characteristics,including a large specific surface area,high Young s modulus,enormous stiffness,and low density.The graphene NEMS mainly studies the electromechanical properties of graphene films.Its resonant frequency has a very sensitive response to mass,force,and heat,which has a great application prospect in the sensing field.Meanwhile,the optical fiber sensor has been widely studied and applied,whose combination with graphene can possess a greater advantage.In this paper,the working principle,preparation process,sensing application of the graphene NEMS as well as the fiber-based graphene NEMS sensors are reviewed and prospected.

关 键 词：光纤光学 石墨烯 纳机电系统 光纤 传感 

分 类 号：TN253[电子电信—物理电子学]