MEMS陀螺仪抗冲击设计技术  

Impact Design Technology of MEMS Gyroscopes

作　　者：陈婷 吴康雄[1] 刘玉县[2] 何春华[2] Chen Ting;Wu Kangxiong;Liu Yuxian;He Chunhua(College of Automotive and Mechanical Engineering , Changsha University of Science and Technology , Changsha 410002, China;Institute of Microelectronics、Peking University , Beijing 100871, China)

机构地区：[1]长沙理工大学汽车与机械工程学院,长沙410002 [2]北京大学微电子研究院,北京100871

出　　处：《微纳电子技术》2019年第8期636-643,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61434003)

摘　　要：为了提高微电子机械系统(MEMS)陀螺仪的抗冲击能力,设计了一种抗冲击保护结构。通过建立陀螺仪结构双自由度冲击模型,推导出陀螺仪结构和冲击保护结构的冲击响应方程,分别对陀螺仪和冲击保护结构进行详细的位移与加速度响应的理论推导。根据理论推导在Matlab上对位移和加速度响应随影响因素的变化进行仿真分析,并对有无冲击保护结构的陀螺仪抗冲击能力进行对比分析。仿真分析表明增加冲击保护结构后陀螺仪的抗冲击能力至少提高了3倍,验证了设计的冲击保护结构的有效性。实验表明冲击频率越接近陀螺仪的固有频率,冲击响应越大,梁越容易发生断裂失效。An impact protection structure was designed to improve the impact ability of the microelectromechanical system(MEMS)gyroscopes.By establishing the double degrees of freedom impact model of the gyroscope structure,the impact response equations of the gyroscope structure and impact protection structure were derived.The detailed displacement and acceleration response of the gyroscope structure and impact protection structure were theoretically derived,respectively.According to the theoretical derivation,the variations of the displacement and acceleration response with the influencing factors were simulated and analyzed by Matlab,and the impact abilities of the gyroscopes with and without the impact protection structures were compared and analyzed.The simulation analysis shows that the impact ability of the gyroscopes is increased by at least 3 times after using the impact protection structure,verifying the effectiveness of the designed impact protection structure.Besides,the experiments show that the closer the impact frequency is to the natural frequency of the gyroscope,the larger the impact response and the more susceptible the beam to the fracture failure.

关 键 词：微电子机械系统(MEMS) 陀螺仪 双自由度冲击模型 抗冲击保护结构 位移响应 加速度响应 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH703[机械工程—仪器科学与技术]